Abstract: A compound lens assembly and method for making a compound lens assembly useful for deep ultraviolet lithography are described. The compound lens assembly includes a first lens component having an optical surface bonded to an optical surface of a second lens component. The bonding at the interface can be achieved using a hydroxide catalysis bonding technique. The compound lens assembly and process for making same solve problems relating to constringence and/or inherent birefringence known for conventional optical elements used in deep ultraviolet lithography or inspection of wafers or reticles in the DUV.

Abstract: The method of aligning a cylindrical lens in a lens assembly includes attaching the cylindrical lens to a lens fixture and interfacing the lens fixture to a support structure in which the cylindrical lens can be placed in a frontwards and backwards orientation. The method also includes capturing respective first and second line images of respective first and second focus lines as formed by the cylindrical lens in the forwards and backwards orientations. The method further includes establishing a relative orientation of the first and second line images and using the established relative orientation to determine an amount of angular misalignment of the cylindrical lens relative to a reference direction provided by the support structure. The method can include rotating the cylindrical lens relative to the lens fixture to reduce the amount of angular misalignment to be within an angular alignment tolerance.

Abstract: The method of aligning a cylindrical lens in a lens assembly includes attaching the cylindrical lens to a lens fixture and interfacing the lens fixture to a support structure in which the cylindrical lens can be placed in a frontwards and backwards orientation. The method also includes capturing respective first and second line images of respective first and second focus lines as formed by the cylindrical lens in the forwards and backwards orientations. The method further includes establishing a relative orientation of the first and second line images and using the established relative orientation to determine an amount of angular misalignment of the cylindrical lens relative to a reference direction provided by the support structure. The method can include rotating the cylindrical lens relative to the lens fixture to reduce the amount of angular misalignment to be within an angular alignment tolerance.

Abstract: A compound lens assembly and method for making a compound lens assembly useful for deep ultraviolet lithography are described. The compound lens assembly includes a first lens component having an optical surface bonded to an optical surface of a second lens component. The bonding at the interface can be achieved using a hydroxide catalysis bonding technique. The compound lens assembly and process for making same solve problems relating to constringence and/or inherent birefringence known for conventional optical elements used in deep ultraviolet lithography or inspection of wafers or reticles in the DUV.