Patents by Inventor Michael MR. Robinson

Michael MR. Robinson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of making silica-titania extreme ultraviolet elements
    Publication number: 20030226377
    Abstract: Methods and apparatus for manufacturing titania-containing fused silica bodies are disclosed. The titania-containing fused silica bodies are subsequently processed to make extreme ultraviolet soft x-ray masks. The methods and apparatus involve providing powders external to a furnace cavity and depositing the powders in the furnace cavity to form a titania-containing fused silica body.
    Type: Application
    Filed: March 3, 2003
    Publication date: December 11, 2003
    Inventors: W. Tim Barrett, Bradley F. Bowden, Claude L. Davis, Kenneth E. Hrdina, Michael MR. Robinson, Michael H. Wasilewski, John F. Wight