Patents by Inventor Michael Mutch
Michael Mutch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250089318Abstract: A transistor comprises a top source/drain region, a bottom source/drain region, a channel region vertically between the top and bottom source/drain regions, and a gate operatively laterally-adjacent the channel region. The channel region is crystalline and comprises a plurality of vertically-elongated crystal grains that individually are directly against both of the top source/drain region and the bottom source/drain region. Other embodiments, including methods, are disclosed.Type: ApplicationFiled: November 20, 2024Publication date: March 13, 2025Applicant: Micron Technology, Inc.Inventors: Manuj Nahar, Vassil N. Antonov, Kamal M. Karda, Michael Mutch, Hung-Wei Liu, Jeffery B. Hull
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Patent number: 12191354Abstract: A transistor comprises a top source/drain region, a bottom source/drain region, a channel region vertically between the top and bottom source/drain regions, and a gate operatively laterally-adjacent the channel region. The channel region is crystalline and comprises a plurality of vertically-elongated crystal grains that individually are directly against both of the top source/drain region and the bottom source/drain region. Other embodiments, including methods, are disclosed.Type: GrantFiled: July 8, 2022Date of Patent: January 7, 2025Assignee: Micron Technology, Inc.Inventors: Manuj Nahar, Vassil N. Antonov, Kamal M. Karda, Michael Mutch, Hung-Wei Liu, Jeffery B. Hull
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Publication number: 20240379739Abstract: A device comprises a first crystalline material, a second material in a substantially crystalline form, a blocking material between the first crystalline material and the second material, and a third material in a substantially crystalline form and adjacent the second material. A crystallization temperature of the third material is different from a crystallization temperature of the second material. At least one of the second material and the third material is substantially free of a grain boundary therein. Also disclosed is a device including a transistor. The transistor comprises a first crystalline material, a substantially continuous crystalline structure, and a blocking material between the first crystalline material and the substantially continuous crystalline structure. The substantially continuous crystalline structure comprises a second crystalline material and a third crystalline material having a different crystallization temperature than the second crystalline material.Type: ApplicationFiled: July 24, 2024Publication date: November 14, 2024Inventors: Michael Mutch, Manuj Nahar, Wayne I. Kinney
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Patent number: 12057472Abstract: A method includes forming a semiconductor structure. The structure includes a first material, a blocking material, a second material in an amorphous form, and a third material in an amorphous form. The blocking material is disposed between the first material and the second material. At least the second material and the third material each comprise silicon and/or germanium. The structure is exposed to a temperature above a crystallization temperature of the third material and below a crystallization temperature of the second material. Semiconductor structures, memory devices, and systems are also disclosed.Type: GrantFiled: October 28, 2022Date of Patent: August 6, 2024Assignee: Micron Technology, Inc.Inventors: Michael Mutch, Manuj Nahar, Wayne I. Kinney
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Publication number: 20240234482Abstract: A microelectronic device comprises an access device comprising a source region and a drain region spaced from the source region, an insulative material vertically adjacent to the access device, and a capacitor within the insulative material and in electrical communication with the access device. The capacitor comprises a material comprising silicon oxynitride or titanium silicon nitride over surfaces of the insulative material, a first electrode comprising titanium nitride on the material, a dielectric material over the first electrode, and a second electrode on the dielectric material. Related methods of forming the microelectronic device and an electronic system including the microelectronic devices are also described.Type: ApplicationFiled: October 19, 2022Publication date: July 11, 2024Inventors: Sanket S. Kelkar, Michael Mutch, Luca Fumagalli, Hisham Abdussamad Abbas, Brenda D. Kraus, Dojun Kim, Christopher W. Petz, Darwin Franseda Fan
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Publication number: 20240136391Abstract: A microelectronic device comprises an access device comprising a source region and a drain region spaced from the source region, an insulative material vertically adjacent to the access device, and a capacitor within the insulative material and in electrical communication with the access device. The capacitor comprises a material comprising silicon oxynitride or titanium silicon nitride over surfaces of the insulative material, a first electrode comprising titanium nitride on the material, a dielectric material over the first electrode, and a second electrode on the dielectric material. Related methods of forming the microelectronic device and an electronic system including the microelectronic devices are also described.Type: ApplicationFiled: October 18, 2022Publication date: April 25, 2024Inventors: Sanket S. Kelkar, Michael Mutch, Luca Fumagalli, Hisham Abdussamad Abbas, Brenda D. Kraus, Dojun Kim, Christopher W. Petz, Darwin Franseda Fan
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Patent number: 11935574Abstract: A memory cell comprises a capacitor comprising a first capacitor electrode having laterally-spaced walls, a second capacitor electrode comprising a portion above the first capacitor electrode, and capacitor insulator material between the second capacitor electrode and the first capacitor electrode. The capacitor comprises an intrinsic current leakage path from one of the first and second capacitor electrodes to the other through the capacitor insulator material. A parallel current leakage path is between the second capacitor electrode and the first capacitor electrode. The parallel current leakage path is circuit-parallel with the intrinsic current leakage path, of lower total resistance than the intrinsic current leakage path, and comprises leaker material that is everywhere laterally-outward of laterally-innermost surfaces of the laterally-spaced walls of the first capacitor electrode. Other embodiments, including methods, are disclosed.Type: GrantFiled: October 7, 2021Date of Patent: March 19, 2024Assignee: Micron Technology, Inc.Inventors: Michael Mutch, Ashonita A. Chavan, Sameer Chhajed, Beth R. Cook, Kamal Kumar Muthukrishnan, Durai Vishak Nirmal Ramaswamy, Lance Williamson
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Patent number: 11735416Abstract: A method includes forming a first amorphous material, forming a second amorphous material over and in contact with the first material, removing a portion of the second material and the first material to form pillars, and exposing the materials to a temperature between a crystallization temperature of the first material and a crystallization temperature of the second material. The first material and the second material each comprise at least one element selected from the group consisting of silicon and germanium. The second material exhibits a crystallization temperature different than a crystallization temperature of the first material. Semiconductor structures, memory devices, and systems are also disclosed.Type: GrantFiled: September 21, 2020Date of Patent: August 22, 2023Assignee: Micron Technology, Inc.Inventors: Ashonita A. Chavan, Durai Vishak Nirmal Ramaswamy, Michael Mutch, Sameer Chhajed
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Patent number: 11728387Abstract: A method of forming a semiconductor structure includes forming a first material over a base material by vapor phase epitaxy. The first material has a crystalline portion and an amorphous portion. The amorphous portion of the first material is removed by abrasive planarization. At least a second material is formed by vapor phase epitaxy over the crystalline portion of first material. The second material has a crystalline portion and an amorphous portion. The amorphous portion of the second material is removed by abrasive planarization. A semiconductor structure formed by such a method includes the substrate, the first material, the second material, and optionally, an oxide material between the first material and the second material. The substrate, the first material, and the second material define a continuous crystalline structure. Semiconductor structures, memory devices, and systems are also disclosed.Type: GrantFiled: May 13, 2021Date of Patent: August 15, 2023Assignee: Micron Technology, Inc.Inventors: Michael Mutch, Manuj Nahar
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Patent number: 11695071Abstract: A transistor comprises a top source/drain region, a bottom source/drain region, and a channel region vertically between the top and bottom source/drain regions. A gate is operatively laterally-adjacent the channel region. The top source/drain region, the bottom source/drain region, and the channel region respectively have crystal grains and grain boundaries between immediately-adjacent of the crystal grains. At least one of the bottom source/drain region and the channel region has an internal interface there-within between the crystal grains that are above the internal interface and the crystal grains that are below the internal interface. At least some of the crystal grains that are immediately-above the internal interface physically contact at least some of the crystal grains that are immediately-below the internal interface.Type: GrantFiled: January 27, 2021Date of Patent: July 4, 2023Assignee: Micron Technology, Inc.Inventors: Manuj Nahar, Michael Mutch
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Publication number: 20230074063Abstract: A method includes forming a semiconductor structure. The structure includes a first material, a blocking material, a second material in an amorphous form, and a third material in an amorphous form. The blocking material is disposed between the first material and the second material. At least the second material and the third material each comprise silicon and/or germanium. The structure is exposed to a temperature above a crystallization temperature of the third material and below a crystallization temperature of the second material. Semiconductor structures, memory devices, and systems are also disclosed.Type: ApplicationFiled: October 28, 2022Publication date: March 9, 2023Inventors: Michael Mutch, Manuj Nahar, Wayne I. Kinney
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Patent number: 11587938Abstract: Some embodiments include a capacitor having a container-shaped bottom portion. The bottom portion has a first region over a second region. The first region is thinner than the second region. The first region is a leaker region and the second region is a bottom electrode region. The bottom portion has an interior surface that extends along the first and second regions. An insulative material extends into the container shape. The insulative material lines the interior surface of the container shape. A conductive plug extends into the container shape and is adjacent the insulative material. A conductive structure extends across the conductive plug, the insulative material and the first region of the bottom portion. The conductive structure directly contacts the insulative material and the first region of the bottom portion, and is electrically coupled with the conductive plug. Some embodiments include methods of forming assemblies.Type: GrantFiled: June 10, 2020Date of Patent: February 21, 2023Assignee: Micron Technology, Inc.Inventors: Michael Mutch, Sanket S. Kelkar, Ashonita A. Chavan, Sameer Chhajed, Adriel Jebin Jacob Jebaraj
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Patent number: 11532699Abstract: A method includes forming a semiconductor structure. The structure includes a first material, a blocking material, a second material in an amorphous form, and a third material in an amorphous form. The blocking material is disposed between the first material and the second material. At least the second material and the third material each comprise silicon and/or germanium. The structure is exposed to a temperature above a crystallization temperature of the third material and below a crystallization temperature of the second material. Semiconductor structures, memory devices, and systems are also disclosed.Type: GrantFiled: June 10, 2020Date of Patent: December 20, 2022Assignee: Micron Technology, Inc.Inventors: Michael Mutch, Manuj Nahar, Wayne I. Kinney
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Publication number: 20220344468Abstract: A transistor comprises a top source/drain region, a bottom source/drain region, a channel region vertically between the top and bottom source/drain regions, and a gate operatively laterally-adjacent the channel region. The channel region is crystalline and comprises a plurality of vertically-elongated crystal grains that individually are directly against both of the top source/drain region and the bottom source/drain region. Other embodiments, including methods, are disclosed.Type: ApplicationFiled: July 8, 2022Publication date: October 27, 2022Applicant: Micron Technology, Inc.Inventors: Manuj Nahar, Vassil N. Antonov, Kamal M. Karda, Michael Mutch, Hung-Wei Liu, Jeffery B. Hull
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Patent number: 11417730Abstract: A transistor comprises a top source/drain region, a bottom source/drain region, a channel region vertically between the top and bottom source/drain regions, and a gate operatively laterally-adjacent the channel region. The channel region is crystalline and comprises a plurality of vertically-elongated crystal grains that individually are directly against both of the top source/drain region and the bottom source/drain region. Other embodiments, including methods, are disclosed.Type: GrantFiled: August 6, 2020Date of Patent: August 16, 2022Assignee: Micron Technology, Inc.Inventors: Manuj Nahar, Vassil N. Antonov, Kamal M. Karda, Michael Mutch, Hung-Wei Liu, Jeffery B. Hull
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Publication number: 20220028442Abstract: A memory cell comprises a capacitor comprising a first capacitor electrode having laterally-spaced walls, a second capacitor electrode comprising a portion above the first capacitor electrode, and capacitor insulator material between the second capacitor electrode and the first capacitor electrode. The capacitor comprises an intrinsic current leakage path from one of the first and second capacitor electrodes to the other through the capacitor insulator material. A parallel current leakage path is between the second capacitor electrode and the first capacitor electrode. The parallel current leakage path is circuit-parallel with the intrinsic current leakage path, of lower total resistance than the intrinsic current leakage path, and comprises leaker material that is everywhere laterally-outward of laterally-innermost surfaces of the laterally-spaced walls of the first capacitor electrode. Other embodiments, including methods, are disclosed.Type: ApplicationFiled: October 7, 2021Publication date: January 27, 2022Applicant: Micron Technology, Inc.Inventors: Michael Mutch, Ashonita A. Chavan, Sameer Chhajed, Beth R. Cook, Kamal Kumar Muthukrishnan, Durai Vishak Nirmal Ramaswamy, Lance Williamson
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Publication number: 20210391343Abstract: Some embodiments include a capacitor having a container-shaped bottom portion. The bottom portion has a first region over a second region. The first region is thinner than the second region. The first region is a leaker region and the second region is a bottom electrode region. The bottom portion has an interior surface that extends along the first and second regions. An insulative material extends into the container shape. The insulative material lines the interior surface of the container shape. A conductive plug extends into the container shape and is adjacent the insulative material. A conductive structure extends across the conductive plug, the insulative material and the first region of the bottom portion. The conductive structure directly contacts the insulative material and the first region of the bottom portion, and is electrically coupled with the conductive plug. Some embodiments include methods of forming assemblies.Type: ApplicationFiled: June 10, 2020Publication date: December 16, 2021Applicant: Micron Technology, Inc.Inventors: Michael Mutch, Sanket S. Kelkar, Ashonita A. Chavan, Sameer Chhajed, Adriel Jebin Jacob Jebaraj
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Patent number: 11170834Abstract: A memory cell comprises a capacitor comprising a first capacitor electrode having laterally-spaced walls, a second capacitor electrode comprising a portion above the first capacitor electrode, and capacitor insulator material between the second capacitor electrode and the first capacitor electrode. The capacitor comprises an intrinsic current leakage path from one of the first and second capacitor electrodes to the other through the capacitor insulator material. A parallel current leakage path is between the second capacitor electrode and the first capacitor electrode. The parallel current leakage path is circuit-parallel with the intrinsic current leakage path, of lower total resistance than the intrinsic current leakage path, and comprises leaker material that is everywhere laterally-outward of laterally-innermost surfaces of the laterally-spaced walls of the first capacitor electrode. Other embodiments, including methods, are disclosed.Type: GrantFiled: July 10, 2019Date of Patent: November 9, 2021Assignee: Micron Technology, Inc.Inventors: Michael Mutch, Ashonita A. Chavan, Sameer Chhajed, Beth R. Cook, Kamal Kumar Muthukrishnan, Durai Vishak Nirmal Ramaswamy, Lance Williamson
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Publication number: 20210265466Abstract: A method of forming a semiconductor structure includes forming a first material over a base material by vapor phase epitaxy. The first material has a crystalline portion and an amorphous portion. The amorphous portion of the first material is removed by abrasive planarization. At least a second material is formed by vapor phase epitaxy over the crystalline portion of first material. The second material has a crystalline portion and an amorphous portion. The amorphous portion of the second material is removed by abrasive planarization. A semiconductor structure formed by such a method includes the substrate, the first material, the second material, and optionally, an oxide material between the first material and the second material. The substrate, the first material, and the second material define a continuous crystalline structure. Semiconductor structures, memory devices, and systems are also disclosed.Type: ApplicationFiled: May 13, 2021Publication date: August 26, 2021Inventors: Michael Mutch, Manuj Nahar
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Publication number: 20210175357Abstract: A transistor comprises a top source/drain region, a bottom source/drain region, and a channel region vertically between the top and bottom source/drain regions. A gate is operatively laterally-adjacent the channel region. The top source/drain region, the bottom source/drain region, and the channel region respectively have crystal grains and grain boundaries between immediately-adjacent of the crystal grains. At least one of the bottom source/drain region and the channel region has an internal interface there-within between the crystal grains that are above the internal interface and the crystal grains that are below the internal interface. At least some of the crystal grains that are immediately-above the internal interface physically contact at least some of the crystal grains that are immediately-below the internal interface.Type: ApplicationFiled: January 27, 2021Publication date: June 10, 2021Applicant: Micron Technology, Inc.Inventors: Manuj Nahar, Michael Mutch