Patents by Inventor Michael Navone

Michael Navone has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for laser-sustained plasma illumination
    Patent number: 10257918
    Abstract: An illumination pump source is disclosed. The illumination pump source includes a set of power sources configured to generate a set of laser beams, with at least some of the set of laser beams configured to include illumination having different wavelengths. The illumination pump source also includes an optical fiber. The illumination pump source also includes one or more optical elements, the one or more optical elements configured to couple the illumination from at least some of the laser beams to one or more regions of the optical fiber.
    Type: Grant
    Filed: September 23, 2016
    Date of Patent: April 9, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Anant Chimmalgi, Sebaek Oh, Joshua Wittenberg, Lauren Wilson, Rahul Yadav, Ilya Bezel, Michael Navone, Anatoly Shchemelinin
  • System and Method for Laser-Sustained Plasma Illumination
    Publication number: 20170094765
    Abstract: An illumination pump source is disclosed. The illumination pump source includes a set of power sources configured to generate a set of laser beams, with at least some of the set of laser beams configured to include illumination having different wavelengths. The illumination pump source also includes an optical fiber. The illumination pump source also includes one or more optical elements, the one or more optical elements configured to couple the illumination from at least some of the laser beams to one or more regions of the optical fiber.
    Type: Application
    Filed: September 23, 2016
    Publication date: March 30, 2017
    Inventors: Anant Chimmalgi, Sebaek Oh, Joshua Wittenberg, Lauren Wilson, Rahul Yadav, Ilya Bezel, Michael Navone, Anatoly Shchemelinin