Abstract: The present disclosure relates to systems and methods for detecting anomalies in a semiconductor processing system. According to certain embodiments, one or more external sensors are mounted to a sub-fab component, communicating with the processing system via a communication channel different than a communication channel utilized by the sub-fab component and providing extrinsic sensor data that the sub-fab component is not configured to provide. The extrinsic sensor data may be combined with sensor data from a processing tool of the system and/or intrinsic sensor data of the sub-fab component to form virtual sensor data. In the event the virtual data exceeds or falls below a threshold, an intervention or a maintenance signal is dispatched, and in certain embodiments, an intervention or maintenance action is taken by the system.

Abstract: The drive mechanism (10) has a drive member (12) and a flexible conveying member (14). The engaging elements (12b) of the drive member (12) have an engaging element spacing (t1), while the associated counter elements (14b) of the conveyor member 14 have a counter element spacing (t2). According to the invention the engaging element spacing (t1) of the engaging elements (12b) is larger than the counter element spacing (t2) of the counter elements (14b) of the conveying member in order to compensate for conveyor member stretching in operation. In a preferred embodiment the conveying member is a flexible conveyor chain and the drive member (12) is a toothed drive wheel. In another preferred embodiment the ratio of the engaging element spacing (t1) of the drive member (12) to the counter element spacing (t2) of the conveying member (14) is between about 1.01 and about 1.10.

Abstract: The drive mechanism (10) has a drive member (12) and a flexible conveying member (14). The engaging elements (12b) of the drive member (12) have an engaging element spacing (t1), while the associated counter elements (14b) of the conveyor member 14 have a counter element spacing (t2). According to the invention the engaging element spacing (t1) of the engaging elements (12b) is larger than the counter element spacing (t2) of the counter elements (14b) of the conveying member in order to compensate for conveyor member stretching in operation. In a preferred embodiment the conveying member is a flexible conveyor chain and the drive member (12) is a toothed drive wheel. In another preferred embodiment the ratio of the engaging element spacing (t1) of the drive member (12) to the counter element spacing (t2) of the conveying member (14) is between about 1.01 and about 1.10.