Abstract: In one general aspect, methods and articles of manufacture for creating micro-structures are disclosed. In one embodiment, the micro-structures are configured to provide a desired level of hermiticity to other micro-sized devices, such as MEMS and microfluidic devices. In one embodiment, the microstructures are formed from a single species of photoresist, where the photoresist is lithographically patterned to encapsulate the micro-sized device. In general, the ability to form an encapsulating micro-structure from a single photoresist relies in part on applying variable light doses to a later of photoresist to affect a desired level of cross-linking within the photoresist.

Abstract: Systems and methods are provided that provide for surface estimation of an object. In particular, the surface estimation can be determined with little or no a priori information regarding the position or topography of the object within a given volume. In select embodiments, the systems and methods can be used for microwave imaging, and particularly for estimating breast surfaces during the imaging process.