Abstract: A testing and analysis system for a pressure-sensitive device (42) that includes a testing stage (10) comprising a platform having a groove situated on an upper surface, an endless support gasket located in the endless groove, a pressure port located on the upper surface and interior to the endless groove, and a means for securing a substrate above the upper surface. The substrate (40) supports a pressure-sensitive device (42) to form a pressure chamber between the substrate (40) and the upper surface. A pressure source (32) is operatively connected to the pressure port to modify a pressure inside the pressure chamber and deflect the pressure-sensitive device (42). A surface profile measurement apparatus (104) is included for measuring a surface profile of the deflected pressure-sensitive device (42).

Abstract: An improved piezoresistive-based sensor (78) can include a cavity (66) in a substantially solid substrate (68). A reactive agent can optionally be present in the cavity (66). A flexible machined membrane can form a wall of the cavity (66). The flexible machined membrane can include an array of channels (76) configured to permit selective passage of a target material into and out of the cavity. Additionally, the flexible machined membrane can include a piezoresistive features (74) associated with the membrane. The reactive agent included in the cavity (66) can be volumetrically responsive to the presence of the target material or fluid. These sensors can be configured as pressure sensors, chemical sensors, flow sensors, and the like.

Abstract: A method of forming a sensor with an embedded cavity can include forming at least one cavity (50) in a substrate (52). The cavity (50) can include at least one membrane wall (54) having a plurality of holes (64) in the membrane wall (54), the plurality of holes (64) being formed in a two-dimensional array. A piezoresistive system (58) can be mechanically associated with the membrane wall (54). The method can be a front-side or back-side process for forming the cavity (50). The membrane (54) simultaneously acts as a diaphragm and a fluid passage into the cavity (50). Such sensors can be suitable as pressure sensors, chemical sensors, flow sensors and the like.

Abstract: A testing and analysis system for a pressure-sensitive device (42) that includes a testing stage (10) comprising a platform having an upper surface, a groove situated on the upper surface, an endless support gasket located in the endless groove, a pressure port located on the upper surface and interior to the endless groove, and a means for securing a substrate above the upper surface. The system also includes a substrate (40) supporting a pressure-sensitive device (42), such that the substrate (40) is secured above the upper surface and in contact with the endless support gasket to form a pressure chamber between the substrate (40) and the upper surface and in fluid communication with the pressure-sensitive device (42). The system further includes a pressure source (32) operatively connected to the pressure port and configured to modify a pressure inside the pressure chamber and deflect the pressure-sensitive device (42).