Patents by Inventor Michael P. C. Watts

Michael P. C. Watts has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8889332
    Abstract: A polymerizable composition includes an organic modified silicate selected from the group consisting of silsesquioxanes having the composition RSiO1.5, partially condensed alkoxysilanes, organically modified silicates having the composition RSiO3 and R2SiO2, and partially condensed orthosilicates having the composition SiOR4, where R is an organic substituent; a decomposable organic compound; a photoinitiator; and a release agent. The composition polymerizes upon exposure to UV radiation to form an inorganic silica network, and the decomposable organic compound decomposes upon exposure to heat to form pores in the inorganic silica network. The composition may be used to form a patterned dielectric layer in an integrated circuit device. A metallic film may be disposed on the patterned dielectric layer and then planarized.
    Type: Grant
    Filed: June 29, 2011
    Date of Patent: November 18, 2014
    Assignees: Canon Nanotechnologies, Inc., Molecular Imprints, Inc.
    Inventors: Frank Y. Xu, Jun Sung Chun, Michael P. C. Watts
  • Patent number: 8349241
    Abstract: The present invention is directed to a method of and a mold for arranging features on a substrate to replicate the features with minimal dimensional variability. The method includes arranging features on a layer to minimize thickness variations in the layer that are attributable to density variations of the plurality of features on the layer. The features are transferred into an underlying substrate. It is believed that by forming the features so as to define a uniform fill factor in the layer, the thickness variations may be reduced, if not abrogated. To that end, one method in accordance with the present invention includes forming a flowable material on the substrate. Thereafter, a plurality of features is formed in a region of the flowable material. The plurality of features are arranged to provide a substantially uniform fill factor in the region.
    Type: Grant
    Filed: October 4, 2002
    Date of Patent: January 8, 2013
    Assignee: Molecular Imprints, Inc.
    Inventors: Sidlgata V. Sreenivasan, Michael P. C. Watts
  • Patent number: 8318066
    Abstract: The present invention is directed to methods for patterning a substrate by imprint lithography. Imprint lithography is a process in which a liquid is dispensed onto a substrate. A template is brought into contact with the liquid and the liquid is cured. The cured liquid includes an imprint of any patterns formed in the template. In one embodiment, the imprint process is designed to imprint only a portion of the substrate. The remainder of the substrate is imprinted by moving the template to a different portion of the template and repeating the imprint lithography process.
    Type: Grant
    Filed: May 16, 2011
    Date of Patent: November 27, 2012
    Assignee: Molecular Imprints, Inc.
    Inventors: Sidlgata V. Sreenivasan, Byung-Jin Choi, Norman E. Schumaker, Ronald D. Voisin, Michael P. C. Watts, Mario Johannes Meissl
  • Patent number: 8076386
    Abstract: The present invention is directed to a material for use in imprint lithography that features a composition having a viscosity associated therewith and including a surfactant, a polymerizable component, and an initiator responsive to a stimuli to vary the viscosity in response thereto, with the composition, in a liquid state, having the viscosity being lower than about 100 centipoises, a vapor pressure of less than about 20 Torr, and in a solid cured state a tensile modulus of greater than about 100 MPa, a break stress of greater than about 3 MPa and an elongation at break of greater than about 2%.
    Type: Grant
    Filed: February 23, 2004
    Date of Patent: December 13, 2011
    Assignees: Molecular Imprints, Inc., Board of Regents, The University of Texas
    Inventors: Frank Y. Xu, Michael P. C. Watts, Nicholas A. Stacey
  • Patent number: 8066930
    Abstract: The present invention is directed to a method of forming an imprinting layer on a substrate including high resolution features, and transferring the features into a solidified region of the substrate. Desired thickness of the residual layer may be minimized in addition to visco-elastic behavior of the material.
    Type: Grant
    Filed: March 30, 2010
    Date of Patent: November 29, 2011
    Assignee: Molecular Imprints, Inc.
    Inventors: Sidlgata V. Sreenivasan, Michael P. C. Watts
  • Publication number: 20110221095
    Abstract: The present invention is directed to methods for patterning a substrate by imprint lithography. Imprint lithography is a process in which a liquid is dispensed onto a substrate. A template is brought into contact with the liquid and the liquid is cured. The cured liquid includes an imprint of any patterns formed in the template. In one embodiment, the imprint process is designed to imprint only a portion of the substrate. The remainder of the substrate is imprinted by moving the template to a different portion of the template and repeating the imprint lithography process.
    Type: Application
    Filed: May 16, 2011
    Publication date: September 15, 2011
    Applicant: MOLECULAR IMPRINTS, INC.
    Inventors: Sidlgata V. Sreenivasan, Byung J. Choi, Norman E. Schumaker, Ronald D. Voisin, Michael P. C. Watts, Mario J. Meissl
  • Patent number: 7981481
    Abstract: The present invention provides a method of controlling the distribution of a fluid on a body that features compensating for varying distribution of constituent components of a composition that moved over a surface of a substrate. To that end, the method includes generating a sequence of patterns of liquid upon a substrate, each of which includes a plurality of spaced-apart liquid regions, with voids being defined between adjacent liquid regions. A second of the patterns of liquid of the sequence is arranged so that the liquid regions associated therewith are in superimposition with the voids of a first of the patterns of liquid of the sequence.
    Type: Grant
    Filed: December 8, 2006
    Date of Patent: July 19, 2011
    Assignee: Molecular Imprints, Inc.
    Inventors: Frank Xu, Ian McMackin, PanKaj B. Lad, Michael P. C. Watts
  • Patent number: 7943081
    Abstract: Methods of forming continuous layers on regions of a substrate are described. Generally, an imprint lithography template may contact liquid positioned on the substrate. The liquid may be cured forming a masking layer, and the imprint lithography template separated from the masking layer. Prior to separation, pressurized gas and/or vacuum may be applied between the template and the substrate. Additionally, during separation, pressurized gas and/or vacuum may be applied between the template and the substrate.
    Type: Grant
    Filed: April 19, 2010
    Date of Patent: May 17, 2011
    Assignee: Molecular Imprints, Inc.
    Inventors: Sidlgata V. Sreenivasan, Byung-Jin Choi, Norman E. Schumaker, Ronald D. Voisin, Michael P. C. Watts, Mario Johannes Meissl
  • Patent number: 7939131
    Abstract: The present invention includes a method and a composition to form a layer on a substrate having uniform etch characteristics. To that end, the method includes controlling variations in the characteristics of a solid layer, such etch characteristics over the area of the solid layer as a function of the relative rates of evaporation of the liquid components that comprise the composition from which the solid layer is formed.
    Type: Grant
    Filed: August 16, 2004
    Date of Patent: May 10, 2011
    Assignee: Molecular Imprints, Inc.
    Inventors: Frank Y. Xu, Christopher J. Mackay, Pankaj B. Lad, Ian M. McMackin, Van N. Truskett, Wesley D. Martin, Edward B. Fletcher, David C. Wang, Nicholas A. Stacey, Michael P. C. Watts
  • Patent number: 7906180
    Abstract: The present invention includes a composition for a silicon-containing material used as an etch mask for underlying layers. More specifically, the silicon-containing material may be used as an etch mask for a patterned imprinted layer comprising protrusions and recessions. To that end, in one embodiment of the present invention, the composition includes a hydroxyl-functional silicone component, a cross-linking component, a catalyst component, and a solvent. This composition allows the silicon-containing material to selectively etch the protrusions and the segments of the patterned imprinting layer in superimposition therewith, while minimizing the etching of the segments in superposition with the recessions, and therefore allowing an in-situ hardened mask to be created by the silicon-containing material, with the hardened mask and the patterned imprinting layer forming a substantially planarized profile.
    Type: Grant
    Filed: August 23, 2006
    Date of Patent: March 15, 2011
    Assignee: Molecular Imprints, Inc.
    Inventors: Frank Y. Xu, Michael N. Miller, Michael P. C. Watts
  • Patent number: 7906058
    Abstract: A method for spreading a conformable material between a substrate and a template having a mold. The method comprises positioning the mold to be in superimposition with the substrate defining a volume therebetween. A first sub-portion of the volume is charged with the conformable material through capillary action between the conformable material and one of the mold and the substrate. A second sub-portion of the volume is filled with the conformable material by creating a deformation in the mold.
    Type: Grant
    Filed: December 16, 2005
    Date of Patent: March 15, 2011
    Assignee: Molecular Imprints, Inc.
    Inventors: Mahadevan GanapathiSubramanian, Byung-Jin Choi, Michael N. Miller, Nicholas A. Stacey, Michael P. C. Watts
  • Patent number: 7845931
    Abstract: The present invention includes a method of solidifying a polymerizable liquid to form a film on a substrate that features minimizing inhibition of the polymerization process by oxygen contained in the atmosphere surrounding the polymerizable liquid. To that end, the polymerizable liquid includes, inter alia, an initiator that consumes oxygen that interacts with the polymerizable liquid and generates additional free radicals to facilitate the polymerizable process.
    Type: Grant
    Filed: September 20, 2007
    Date of Patent: December 7, 2010
    Assignee: Molecular Imprints, Inc.
    Inventors: Frank Y. Xu, Edward Brian Fletcher, Pankaj B. Lad, Michael P. C. Watts
  • Patent number: 7727453
    Abstract: The present invention is directed to a method of forming a layer on a region of a substrate, the method including, inter alia, positioning a liquid on the substrate; and contacting the liquid with the mold, defining a gap between the mold and the substrate, with the gap enabling positioning of the liquid by capillary forces to generate the layer over the region.
    Type: Grant
    Filed: May 11, 2005
    Date of Patent: June 1, 2010
    Assignee: Molecular Imprints, Inc.
    Inventors: Sidlgata V. Sreenivasan, Byung J. Choi, Norman E. Schumaker, Ronald D. Voisin, Michael P. C. Watts, Mario J. Meissl
  • Patent number: 7442336
    Abstract: The present invention provides a method for patterning a substrate with a template having a mold that features positioning conformable material between the substrate and the mold and filling a volume defined between the mold and the substrate with the conformable material through capillary action between the conformable material and one of the mold and the substrate. Thereafter, the conformable material is solidified. Specifically, the distance between the mold and the substrate is controlled to a sufficient degree to attenuate, if not avoid, compressive forces between the mold and the substrate. As a result, upon initial contact of the mold with the conformable material, spontaneous capillary filling of the volume between the mold and the substrate occurs.
    Type: Grant
    Filed: August 21, 2003
    Date of Patent: October 28, 2008
    Assignee: Molecular Imprints, Inc.
    Inventors: Byung-Jin Choi, Sidlgata V. Sreenivasan, Michael P. C. Watts
  • Patent number: 7338275
    Abstract: The present invention is directed to a template having a body including a surface with first and second regions. The first region has first wetting characteristics for a given material and the second region has second wetting characteristics for the given material. The first wetting characteristics differ from the second wetting characteristics. Specifically, the first region is formed from a surface treatment layer with a first surface energy to provide the first wetting characteristics. The second region is exposed portions of the body, typically quartz of fused silica, having a second surface energy associated therewith. The second surface energy is greater than the first surface energy to provide the second region with the second wetting characteristics.
    Type: Grant
    Filed: May 11, 2005
    Date of Patent: March 4, 2008
    Assignee: Molecular Imprints, Inc.
    Inventors: Byung Jin Choi, Mario J. Meissl, Sidlagata V. Sreenivasan, Michael P. C. Watts
  • Patent number: 7281921
    Abstract: Described are methods for patterning a substrate by imprint lithography. Imprint lithography is a process in which a liquid is dispensed onto a substrate. A template is brought into contact with the liquid and the liquid is cured. The cured liquid includes an imprint of any patterns formed in the template. Alignment of the template with a previously formed layer on a substrate, in one embodiment, is accomplished by using scatterometry.
    Type: Grant
    Filed: February 3, 2006
    Date of Patent: October 16, 2007
    Assignee: Molecular Imprints, Inc.
    Inventors: Michael P. C. Watts, Ian M. McMackin
  • Patent number: 7279113
    Abstract: A method of forming a lithographic template having an elastomer layer positioned between a body and an imprinting layer, the imprinting layer having a pattern formed thereon.
    Type: Grant
    Filed: December 9, 2005
    Date of Patent: October 9, 2007
    Assignee: Molecular Imprints, Inc.
    Inventors: Michael P. C. Watts, Ronald D. Voisin, Sidlgata V. Sreenivasan
  • Patent number: 7252715
    Abstract: The present invention provides a system to dispense a liquid, contained in a cartridge, onto a substrate employing a dispensing system under control of a processor in data communication with a memory.
    Type: Grant
    Filed: June 15, 2004
    Date of Patent: August 7, 2007
    Assignee: Molecular Imprints, Inc.
    Inventors: Michael P. C. Watts, Byung-Jin Choi, Sidlgata V. Sreenivasan
  • Patent number: 7224443
    Abstract: The present invention is directed to a chucking system to modulate substrates so as to properly shape and position the same with respect to a wafer upon which a pattern is to be formed with the substrate. The chucking system includes a chuck body having first and second opposed sides. A side surface extends therebetween. The first side includes first and second spaced-apart recesses defining first and second spaced-apart support regions. The first support region cinctures the second support region and the first and second recesses. The second support region cinctures the second recess, with a portion of the body in superimposition with the second recess being transparent to radiation having a predetermined wavelength. The second side and the side surface define exterior surfaces. The body includes throughways placing the first and second recesses in fluid communication with one of the exterior surfaces.
    Type: Grant
    Filed: March 27, 2006
    Date of Patent: May 29, 2007
    Assignee: Molecular Imprints, Inc.
    Inventors: Byung-Jin Choi, Ronald D. Voisin, Sidlgata V. Sreenivasan, Michael P. C. Watts, Daniel A. Babbs, Mario J. Meissl, Hillman L. Bailey, Norman E. Schumaker
  • Patent number: 7157036
    Abstract: The present invention provides a method to reduce adhesion between a conformable region on a substrate and a pattern of a mold, which selectively comes into contact with the conformable region. The method features forming a conformable material on the substrate and contacting the conformable material with the surface. A conditioned layer is formed from the conformable material. The conditioned layer has first and second sub-portions, with the first sub-portion being solidified and the second sub-portion having a first affinity for the surface and a second affinity for the first sub-portion. The first affinity is greater than the second affinity. In this fashion, upon separation of the mold from the conditioned layer, a subset of the second sub-portion maintains contact with the mold, thereby reducing the probability that a pattern formed in the conditioned layer becomes compromised. These and other embodiments are described herein.
    Type: Grant
    Filed: June 17, 2003
    Date of Patent: January 2, 2007
    Assignees: Molecular Imprints, Inc, University of Texas Systems
    Inventors: Byung Jin Choi, Frank Y. Xu, Nicholas A. Stacey, Van Xuan Hong Truskett, Michael P. C. Watts