Abstract: An apparatus for testing sensors in a media includes a chamber portion (240) for holding the sensors, tanks (320, 340) for supplying the media to the chamber portion (240) and coupled in parallel to the chamber portion (240), a pressure generator (310) coupled to the tanks (320, 340), and a heat exchanger (323, 324) adjacent to the tanks (320, 340). The media is simultaneously heated to different temperatures and pressurized to different pressures in the tanks (320, 340). Then, the media is delivered from the tanks (320, 340) to the chamber portion (240), and the sensors detect the media at the different temperatures and pressures.

Abstract: An apparatus for testing electronic devices in hostile media includes an isolation tank (24) which contains an inert or relatively inert material (26) such as fluorinated hydrocarbon liquid. Within the isolation tank (24) submersed in the inert or relatively inert material (26), is at least one test chamber (12) containing hostile and/or volatile test medium (14) such as a fuel mixture. Adjacent to the test chamber (12) and also within isolation tank (24) is a loading chamber (30) via which electronic devices to be tested are coupled to the test tank (12). The loading chamber (30), test tank (12) and isolation tank (24) are all isolated from the ambient environment and are oxygen free because they each contain a gas purge lines (33,35,38) providing an inert or relatively inert gas to a positive pressure within the respective tanks and chamber.

Abstract: A non-venting hazardous material liquid dispensing system (25) includes a removable supply vessel (7) coupled to a gas source (1) and a permanent buffer vessel (11). The permanent buffer vessel (11) is additionally coupled through a suction pump (14) to the removable supply vessel (7). The suction pump (14) suctions pressure off the permanent supply vessel (11), transferring the pressure to removable supply vessel (7). The transfer of pressure causes hazardous material liquid (34) to be drawn from the removable supply vessel (7) into permanent buffer vessel (11). The permanent buffer vessel (11) dispenses hazardous material liquid (34) to a process tool.

Abstract: A vapor reduction system for a solvent bottle (12) which is performed in an enclosure (11). A timer (23) controls events during a purge cycle. A vent (14) removes vapors from the enclosure to a vapor treatment system. Pressurized gas is forced through the solvent bottle (12) which vaporizes solvent liquid. A receptacle (16) receives solvent liquid and vapor forced from solvent bottle (12). A line (17) removes to solvent liquid from the receptacle (16) to an environmentally safe container. A second line (18) removes solvent vapor from the receptacle (16) to the vapor treatment system. A fire extinguishing system (31) senses and extinguishes any fire which may develop.