Patents by Inventor Michael P. Power

Michael P. Power has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Highly durable noncontaminating surround materials for plasma etching
    Patent number: 5364496
    Abstract: A support and positioning apparatus (10) for supporting and positioning a wafer (12), substrate or the like in a plasma assisted chemical etching process. Surround components (14, 16, 18, 20) positioned around the substrate (12) are comprised of substantially pure magnesium or are aluminum coated with a magnesium fluoride coating such that as a plasma tool associated with the plasma etching process traverses the edge of the substrate (12), the plasma etching environment generated from a fluorine containing feed gas emitted from the plasma tool does not significantly erode the surround components (14, 16, 18, 20) or cause contamination of the substrate (12).
    Type: Grant
    Filed: August 20, 1993
    Date of Patent: November 15, 1994
    Assignee: Hughes Aircraft Company
    Inventors: Lynn D. Bollinger, Michael P. Power, Richard R. Poole, George J. Gardopee