Patents by Inventor Michael P. ROHRER

Michael P. ROHRER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Precision dynamic leveling mechanism with long motion capability
    Patent number: 11499666
    Abstract: Embodiments described herein relate to a precision dynamic leveling mechanism for repeatedly positioning the pedestal within a process. The precision dynamic leveling mechanism includes bearing assemblies. Bearing assemblies having inner races forced against a pedestal assembly carrier and outer races forced against a guide adaptor provide nominal clearance between the inner races and outer races to allow the inner races and the outer races to slide on each other with minimal or no radial motion.
    Type: Grant
    Filed: May 1, 2019
    Date of Patent: November 15, 2022
    Assignee: Applied Materials, Inc.
    Inventors: Jason M. Schaller, Michael P. Rohrer, Tuan Anh Nguyen
  • PRECISION DYNAMIC LEVELING MECHANISM WITH LONG MOTION CAPABILITY
    Publication number: 20190360633
    Abstract: Embodiments described herein relate to a precision dynamic leveling mechanism for repeatedly positioning the pedestal within a process. The precision dynamic leveling mechanism includes bearing assemblies. Bearing assemblies having inner races forced against a pedestal assembly carrier and outer races forced against a guide adaptor provide nominal clearance between the inner races and outer races to allow the inner races and the outer races to slide on each other with minimal or no radial motion.
    Type: Application
    Filed: May 1, 2019
    Publication date: November 28, 2019
    Inventors: Jason M. SCHALLER, Michael P. ROHRER, Tuan Anh NGUYEN