Patents by Inventor Michael P. Saltmarsh

Michael P. Saltmarsh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for fabricating microstructures using temporary bridges
    Patent number: 5364497
    Abstract: A method and apparatus for forming bridges between surfaces of a suspended microstructure and other surfaces of the suspended microstructure or particularly placed anchors on the die in order to increase the stiffness and lateral strength of the microstructure during fabrication. Once fabrication is completed, the bridges are cut by a laser thus fully releasing the microstructure into its final suspended and resilient condition.
    Type: Grant
    Filed: August 4, 1993
    Date of Patent: November 15, 1994
    Assignee: Analog Devices, Inc.
    Inventors: Kevin H. L. Chau, Michael P. Saltmarsh, Deborah A. Church