Patents by Inventor Michael Paul ROHRER

Michael Paul ROHRER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Hybrid control system for workpiece heating
    Patent number: 11545375
    Abstract: A system and method of heating a workpiece to a desired temperature is disclosed. This system and method consider the physical limitations of the temperature device, such as time lag, temperature offset, and calibration, in creating a hybrid approach that heats the workpiece more efficiently. First, the workpiece is heated using open loop control to heat the workpiece to a threshold temperature. After the threshold temperature is reach, a closed loop maintenance mode is utilized. In certain embodiments, an open loop maintenance mode is employed between the open loop warmup mode and the closed loop maintenance mode. Additionally, a method of calibrating a pyrometer using a contact thermocouple is also disclosed.
    Type: Grant
    Filed: June 17, 2019
    Date of Patent: January 3, 2023
    Assignee: Applied Materials, Inc.
    Inventors: James D. Strassner, Bradley M. Pomerleau, D. Jeffrey Lischer, Dawei Sun, Michael Paul Rohrer
  • Hybrid Control System For Workpiece Heating
    Publication number: 20200395233
    Abstract: A system and method of heating a workpiece to a desired temperature is disclosed. This system and method consider the physical limitations of the temperature device, such as time lag, temperature offset, and calibration, in creating a hybrid approach that heats the workpiece more efficiently. First, the workpiece is heated using open loop control to heat the workpiece to a threshold temperature. After the threshold temperature is reach, a closed loop maintenance mode is utilized. In certain embodiments, an open loop maintenance mode is employed between the open loop warmup mode and the closed loop maintenance mode. Additionally, a method of calibrating a pyrometer using a contact thermocouple is also disclosed.
    Type: Application
    Filed: June 17, 2019
    Publication date: December 17, 2020
    Inventors: James D. Strassner, Bradley M. Pomerleau, D. Jeffrey Lischer, Dawei Sun, Michael Paul Rohrer
  • Dynamic leveling process heater lift
    Patent number: 10249525
    Abstract: A method and apparatus for of improving processing results in a processing chamber by orienting a substrate support relative to a surface within the processing chamber. The method comprising orienting a supporting surface of a substrate support in a first orientation relative to an output surface of a showerhead, where the first orientation of the supporting surface relative to the output surface is not coplanar, and depositing a first layer of material on a substrate disposed on the supporting surface that is oriented in the first orientation.
    Type: Grant
    Filed: September 14, 2017
    Date of Patent: April 2, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Jason M. Schaller, Michael Paul Rohrer, Tuan Anh Nguyen, William Tyler Weaver, Gregory John Freeman, Robert Brent Vopat
  • DYNAMIC LEVELING PROCESS HEATER LIFT
    Publication number: 20180096874
    Abstract: A method and apparatus for of improving processing results in a processing chamber by orienting a substrate support relative to a surface within the processing chamber.
    Type: Application
    Filed: September 14, 2017
    Publication date: April 5, 2018
    Inventors: Jason M. SCHALLER, Michael Paul ROHRER, Tuan Anh NGUYEN, William Tyler WEAVER, Gregory John FREEMAN, Robert Brent VOPAT