Patents by Inventor Michael Pharand

Michael Pharand has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Low-cost electrostatic clamp with fast de-clamp time
    Patent number: 7714406
    Abstract: A method for manufacturing a semiconductor wafer electrostatic clamp, comprising providing a mounting plate, forming an insulative layer on an insulating portion of the mounting plate, forming a first electrode on a first portion of the mounting plate, forming a second electrode on a second portion of the mounting plate, forming a first segment having a first conductivity over the first electrode, forming a first region having a second conductivity over the first segment that creates an n-p type composite, forming a second segment having a third conductivity formed over the over the second electrode, forming a second region having a fourth conductivity formed over the second region that creates an p-n type composite.
    Type: Grant
    Filed: October 25, 2007
    Date of Patent: May 11, 2010
    Assignee: Axcelis Technologies, Inc.
    Inventors: Marvin Raymond LaFontaine, Michael Pharand, Leonard Michael Rubin, Klaus Becker
  • LOW-COST ELECTROSTATIC CLAMP WITH FAST DE-CLAMP TIME
    Publication number: 20080100984
    Abstract: A method for manufacturing a semiconductor wafer electrostatic clamp, comprising providing a mounting plate, forming an insulative layer on an insulating portion of the mounting plate, forming a first electrode on a first portion of the mounting plate, forming a second electrode on a second portion of the mounting plate, forming a first segment having a first conductivity over the first electrode, forming a first region having a second conductivity over the first segment that creates an n-p type composite, forming a second segment having a third conductivity formed over the over the second electrode, forming a second region having a fourth conductivity formed over the second region that creates an p-n type composite.
    Type: Application
    Filed: October 25, 2007
    Publication date: May 1, 2008
    Inventors: Marvin Raymond LaFontaine, Michael Pharand, Leonard Michael Rubin, Klaus Becker