Patents by Inventor Michael Philip Kincaid

Michael Philip Kincaid has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and device for controlling temperature of a substrate using an internal temperature control device
    Patent number: 7671412
    Abstract: A substrate, thermal treatment assembly and method of operating the thermal treatment assembly are described for controlling the temperature of a substrate. An electrical potential is applied across two or more locations on the substrate in order to generate an electrical current through a portion of the substrate, thereby altering a temperature of the substrate. The electrical current may dissipate electrical energy in the form of thermal energy due to the intrinsic resistance of the portion of substrate to the flow of electrical current.
    Type: Grant
    Filed: February 15, 2007
    Date of Patent: March 2, 2010
    Assignee: Tokyo Electron Limited
    Inventors: Michael A. Carcasi, Michael Philip Kincaid
  • METHOD AND DEVICE FOR CONTROLLING TEMPERATURE OF A SUBSTRATE USING AN INTERNAL TEMPERATURE CONTROL DEVICE
    Publication number: 20080197121
    Abstract: A substrate, thermal treatment assembly and method of operating the thermal treatment assembly are described for controlling the temperature of a substrate An electrical potential is applied across two or more locations on the substrate in order to generate an electrical current through a portion of the substrate, thereby altering a temperature of the substrate. The electrical current may dissipate electrical energy in the form of thermal energy due to the intrinsic resistance of the portion of substrate to the flow of electrical current.
    Type: Application
    Filed: February 15, 2007
    Publication date: August 21, 2008
    Applicant: Tokyo Electron Limited
    Inventors: Michael A. Carcasi, Michael Philip Kincaid