Patents by Inventor Michael Pietzner

Michael Pietzner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20130087463
    Abstract: The present invention provides a system and a method for metal deposition in semiconductor processing, the system comprising a plating tool with one or more plating tanks, each containing one of a respective electrolyte solution, one or more replenishment sections each fluidly connected to a respective one of the one or more plating tanks, one or more draining sections each fluidly connected to a respective one of the one or more plating tanks, and a control system adapted to operate the one or more replenishing sections and/or the one or more draining sections so as to maintain a condition of the electrolyte solutions.
    Type: Application
    Filed: October 5, 2011
    Publication date: April 11, 2013
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Christian Schroiff, Michael Pietzner, Rico Bohla
  • Patent number: 8357268
    Abstract: By providing an enhanced drive system for electrochemical etch process tools, the operational range, as well as the reliability, may be enhanced. For this purpose, a high torque electric motor may be used in combination with an appropriate power transmission, which may be attached to a corresponding tool frame at a height level that is above a corresponding height level at which respective chemicals are provided to the substrate under process. Hence, the probability for contamination by chemicals may be significantly reduced, thereby also reducing maintenance efforts resulting in reduced production costs.
    Type: Grant
    Filed: September 26, 2007
    Date of Patent: January 22, 2013
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Michael Pietzner, Mario Illgen, Kerstin Siury, Frank Kuechenmeister
  • Publication number: 20080156641
    Abstract: By providing an enhanced drive system for electrochemical etch process tools, the operational range, as well as the reliability, may be enhanced. For this purpose, a high torque electric motor may be used in combination with an appropriate power transmission, which may be attached to a corresponding tool frame at a height level that is above a corresponding height level at which respective chemicals are provided to the substrate under process. Hence, the probability for contamination by chemicals may be significantly reduced, thereby also reducing maintenance efforts resulting in reduced production costs.
    Type: Application
    Filed: September 26, 2007
    Publication date: July 3, 2008
    Inventors: Michael Pietzner, Mario Illgen, Kerstin Siury, Frank Kuechenmeister