Abstract: The present invention relates to a process for the purification of fluorinated olefins, in particular hexafluoro-1,3-butadiene, comprising a step wherein a liquid mixture comprising hexafluoro-1,3-butadiene in liquid phase is contacted with at least one adsorbent having an average pore size of less than 10 ?.

Abstract: The present invention relates to a process for cleaning chambers of apparatus used for semiconductor manufacturing with a gas mixture comprising or consisting of fluorine, nitrogen and argon as well as said gas mixtures.

Abstract: The present invention relates to a process for cleaning chambers of apparatus used for semiconductor manufacturing with a gas mixture comprising or consisting of fluorine, nitrogen and argon as well as said gas mixtures.

Abstract: The present invention relates to a method for manufacturing a solar cell from a silicon wafer comprising a step of etching the silicon wafer with specific gas mixtures comprising fluorine, hydrogen fluoride, one or more inert gases and optionally one or more a further gases, to silicon wafers produced using said method as well as to the use of said gas mixtures.

Abstract: A bundle trailer for containers including (i) a supporting frame on which a plurality of bundles are located; (ii) a plurality of bundles, each bundle comprising: a bundle frame, a plurality of containers containing a chemical, and at least one bundle value for controlling delivery of the chemical in the containers; (iii) at least one trailer valve; and (iv) at least one clamp for fixing the bundle is disclosed. The bundle trailer is capable of delivering high purity hygroscopic, corrosive chemicals, such as elemental fluorine and mixtures thereof, with good flexibility, high safety, and low cost.

Abstract: A purge system built with a purge box, pipes, valves, and a manifold panel. Apart from ventilation systems in ordinary gas cabinets, it is characterized by minimizing hazards through safe exhaust of toxic and reactive gases and through prevention of explosion and fire with complete cutoff of air (oxygen, in particular) in case of contamination and leakage arising in such pipes, valves and manifold panel involved in purging inert gases (Ar and N2). The purge box can preferably block external air from a joint area connecting gas pipes and a gas container, such as a cylinder, which is prone to leakage and contamination due to frequent attachments and detachments. In addition, a supply valve of the hazardous reactive chemical is closed, to avoid further releases. Physical and chemical damages resulting from attaching and detaching a cylinder mounted on a gas supply facility including existing or separate gas cabinets can be prevented.

Abstract: A bundle trailer for containers including (i) a supporting frame on which a plurality of bundles are located; (ii) a plurality of bundles, each bundle comprising: a bundle frame, a plurality of containers containing a chemical, and at least one bundle value for controlling delivery of the chemical in the containers; (iii) at least one trailer valve; and (iv) at least one clamp for fixing the bundle is disclosed. The bundle trailer is capable of delivering high purity hygroscopic, corrosive chemicals, such as elemental fluorine and mixtures thereof, with good flexibility, high safety, and low cost.

Abstract: Mixtures of fluorine and inert gases like nitrogen and/or argon can be used for etching of semiconductors, solar panels and flat panels (TFTs and LCDs), and for cleaning of semiconductor surfaces and plasma chambers. Preferably, fluorine is comprised in an amount of 15 to 25 vol.-% in binary mixtures. The gas mixtures can be used as substitute or drop-in for respective mixtures comprising NF3 and permit a very flexible operation of plasma apparatus. For example, apparatus tuned for NF3/Ar mixtures can be operated without further tuning using fluorine and argon, optionally together with nitrogen. The fluorine content is preferably in the range of 1 to 5 vol.-%, if ternary mixtures of fluorine, nitrogen and argon are used.

Abstract: Gas mixtures of SF6 and N2 which have been used as an insulating filler gas for underground cables can be separated by use of a membrane separation in order to recover the SF6.

Abstract: Homogeneous compressed gas mixtures of perfluorinated and/or partially fluorinated hydrocarbons and a gas of lesser density are produced using an optionally mobile mixing station including at least the following components: a gas pre-mixing stage in which separately provided gases are brought together; a static mixer and/or buffer tank connected to the pre-mixing stage; and a compressor connected to the static mixer or buffer tank. If a buffer tank is used, a return line may be provided from the compressor outlet to the buffer tank. Mixtures of perfluorinated and/or partially fluorinated hydrocarbons and/or ethers and inert gases such as noble gases, CO2 or N2 and/or SF6, are obtained which are suitable as insulating gases for current-carrying underground cables or gas-insulated switches. High flow rates can be processed using the method, and mass flow meters ensure accuracy and reliability.

Abstract: A method for the recovery or separation of sulfur oxyfluorides from gas mixtures, in which the gas mixture passes through at least one adsorption stage or membrane stage containing or consisting of zeolites with a modulus >10. The sulfur oxyfluorides fixed to the adsorbent may be made available for use after desorption. The sulfur oxyfluorides enriched through the membrane can be re-used directly.

Abstract: An apparatus for determining the physical and/or chemical parameters of an aerosol formulation from a metered dose inhaler, including a housing (1) with a measuring chamber (8) therein, a multiple sampling head (3) having at least one valve, an opening for receiving the measuring electrode (2), and a mechanism for opening a metered dose inhaler cartridge (5) which includes a sleeve (4), connected detachably or non-detachably to the housing (1), for receiving the metered dose inhaler cartridge, a pin or a needle (7) attached to the surface facing the measuring chamber (8) and protruding into the sleeve (4) for opening the cartridge (5), an actuating element (6) for pressing the cartridge (5) against the pin or needle (7), seals for preventing undesired pressure equalization, and at least one connecting opening (7, 10) to the measuring chamber (8) through which the aerosol formulation can pass unchanged into the measuring chamber.

Abstract: A method for the recovery or separation of sulfur oxyfluorides from gas mixtures, in which the gas mixture passes through at least one adsorption stage or membrane stage containing or consisting of zeolites with a modulus >10. The sulfur oxyfluorides fixed to the adsorbent may be made available for use after desorption. The sulfur oxyfluorides enriched through the membrane can be re-used directly.

Abstract: Gas mixtures of SF6 and N2, which have been used, for example, as an insulating filler gas for underground cables, for insulating-gas window panes or as a filler gas for car tires and SF6/air mixtures which have been used as a protective gas when casting magnesium can be separated if they are contacted with hydrophobic zeolites of a certain pore size as selective adsorption agent for sulfur hexafluoride. For a relatively high SF6 concentration, the mixture is preferably first subjected to a membrane separation process and the permeate is contacted with the adsorption agent. The invention also relates to an apparatus for carrying out the process. The process may also be used for separating SF6 from exhaust gases.

Abstract: Gas mixtures of SF6 and N2 which have been used as an insulating filler gas for underground cables can be separated by use of a membrane separation in order to recover the SF6.

Abstract: Homogeneous compressed gas mixtures with SF.sub.6 and a gas with a density at least 4 grams per liter lower can be prepared by using a mixing station with at least the following elements: a gas premixer in which the separate gases are brought together; a static mixer and/or a buffer tank connected thereto; a compressor connected to the buffer tank or static mixer; and when a buffer tank is used, a return line from the compressor output to the buffer tank. Mixtures of SF.sub.6 and N.sub.2, useful for example as insulating gas for current conducting underground cables, can be produced by this process, which is capable of processing large flow rates. Mass flowmeters ensure high precision and reliability. Also disclosed is a mobile mixing station for implementing this process.

Abstract: Process for the decoloration and the toxification of highly polluted (COD.gtoreq.1000 mg/l) resistant aqueous effluents by an oxidation treatment of the effluents by hydrogen peroxide, continuously and in a homogeneous phase, at a pH of 2 to 5 in the presence of Fe ions and under irradiation by means of UV radiation. The AvOx/COD ratio by weight is not less than 0.5:1 and the AvOx/concentration of Fe ions ratio by weight is not less than 50:1.