Patents by Inventor Michael Prescott

Michael Prescott has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method to reduce downtime while implanting GeF4
    Patent number: 6559462
    Abstract: The operating lifetime of a hot cathode discharge ion source is extended by introducing nitrogen into an ion implantation apparatus after introduction of an ion implantation gas, such as GeF4, is stopped. The nitrogen is preferably introduced along with the GeF4 during implantation as well.
    Type: Grant
    Filed: October 31, 2000
    Date of Patent: May 6, 2003
    Assignee: International Business Machines Corporation
    Inventors: Nicole Susan Carpenter, Robert E. Fields, Nicholas Mone, Jr., Gary Michael Prescott, Donald Walter Rakowski, Richard S. Ray