Patents by Inventor Michael Prindle

Michael Prindle has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10068978
    Abstract: At least one method, apparatus and system disclosed herein for suppressing over-growth of epitaxial layer formed on fins of fin field effect transistor (finFET) to prevent shorts between fins of separate finFET devices. A set of fins of a first transistor is formed. The set of fins comprises a first outer fin, an inner fin, and a second outer fin. An oxide deposition process is performed for depositing an oxide material upon the set of fins. A first recess process is performed for removing a portion of oxide material. This leaves a portion of the oxide material remaining on the inside walls of the first and second outer fins. A spacer nitride deposition process is performed. A spacer nitride removal process is performed, leaving spacer nitride material at the outer walls of the first and second outer fins. A second recess process is performed for removing the oxide material from the inside walls of the first and second outer fins. An epitaxial layer deposition processed upon the set of fins.
    Type: Grant
    Filed: March 29, 2017
    Date of Patent: September 4, 2018
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Kwan-Yong Lim, Christopher Michael Prindle
  • Publication number: 20170200797
    Abstract: At least one method, apparatus and system disclosed herein for suppressing over-growth of epitaxial layer formed on fins of fin field effect transistor (finFET) to prevent shorts between fins of separate finFET devices. A set of fins of a first transistor is formed. The set of fins comprises a first outer fin, an inner fin, and a second outer fin. An oxide deposition process is performed for depositing an oxide material upon the set of fins. A first recess process is performed for removing a portion of oxide material. This leaves a portion of the oxide material remaining on the inside walls of the first and second outer fins. A spacer nitride deposition process is performed. A spacer nitride removal process is performed, leaving spacer nitride material at the outer walls of the first and second outer fins. A second recess process is performed for removing the oxide material from the inside walls of the first and second outer fins. An epitaxial layer deposition processed upon the set of fins.
    Type: Application
    Filed: March 29, 2017
    Publication date: July 13, 2017
    Inventors: Kwan-Yong Lim, Christopher Michael Prindle
  • Patent number: 9640533
    Abstract: At least one method, apparatus and system disclosed herein for suppressing over-growth of epitaxial layer formed on fins of fin field effect transistor (finFET) to prevent shorts between fins of separate finFET devices. A set of fins of a first transistor is formed. The set of fins comprises a first outer fin, an inner fin, and a second outer fin. An oxide deposition process is performed for depositing an oxide material upon the set of fins. A first recess process is performed for removing a portion of oxide material. This leaves a portion of the oxide material remaining on the inside walls of the first and second outer fins. A spacer nitride deposition process is performed. A spacer nitride removal process is performed, leaving spacer nitride material at the outer walls of the first and second outer fins. A second recess process is performed for removing the oxide material from the inside walls of the first and second outer fins. An epitaxial layer deposition processed upon the set of fins.
    Type: Grant
    Filed: March 12, 2015
    Date of Patent: May 2, 2017
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Kwan-Yong Lim, Christopher Michael Prindle
  • Publication number: 20160268257
    Abstract: At least one method, apparatus and system disclosed herein for suppressing over-growth of epitaxial layer formed on fins of fin field effect transistor (finFET) to prevent shorts between fins of separate finFET devices. A set of fins of a first transistor is formed. The set of fins comprises a first outer fin, an inner fin, and a second outer fin. An oxide deposition process is performed for depositing an oxide material upon the set of fins. A first recess process is performed for removing a portion of oxide material. This leaves a portion of the oxide material remaining on the inside walls of the first and second outer fins. A spacer nitride deposition process is performed. A spacer nitride removal process is performed, leaving spacer nitride material at the outer walls of the first and second outer fins. A second recess process is performed for removing the oxide material from the inside walls of the first and second outer fins. An epitaxial layer deposition processed upon the set of fins.
    Type: Application
    Filed: March 12, 2015
    Publication date: September 15, 2016
    Applicant: GLOBALFOUNDRIES Inc.
    Inventors: Kwan-Yong Lim, Christopher Michael Prindle
  • Patent number: 9230802
    Abstract: Field-effect transistors (FETs) and methods of fabricating field-effect transistors are provided, with one or both of a source cavity or a drain cavity having different channel junction characteristics. The methods include, for instance, recessing a semiconductor material to form a cavity adjacent to a channel region of the transistor, the recessing defining a bottom channel interface surface and a sidewall channel interface surface within the cavity; providing a protective liner over the sidewall channel interface surface, with the bottom channel interface surface being exposed within the cavity; processing the bottom channel interface surface to facilitate forming a first channel junction of the transistor; and removing the protective liner from over the sidewall channel interface surface, and subsequently processing the sidewall channel interface surface to form a second channel junction of the transistor, where the first and second channel junctions have different channel junction characteristics.
    Type: Grant
    Filed: May 20, 2014
    Date of Patent: January 5, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Neeraj Tripathi, Christopher Michael Prindle
  • Publication number: 20150340229
    Abstract: Field-effect transistors (FETs) and methods of fabricating field-effect transistors are provided, with one or both of a source cavity or a drain cavity having different channel junction characteristics. The methods include, for instance, recessing a semiconductor material to form a cavity adjacent to a channel region of the transistor, the recessing defining a bottom channel interface surface and a sidewall channel interface surface within the cavity; providing a protective liner over the sidewall channel interface surface, with the bottom channel interface surface being exposed within the cavity; processing the bottom channel interface surface to facilitate forming a first channel junction of the transistor; and removing the protective liner from over the sidewall channel interface surface, and subsequently processing the sidewall channel interface surface to form a second channel junction of the transistor, where the first and second channel junctions have different channel junction characteristics.
    Type: Application
    Filed: May 20, 2014
    Publication date: November 26, 2015
    Applicant: GLOBALFOUNDRIES Inc.
    Inventors: Neeraj TRIPATHI, Christopher Michael PRINDLE
  • Patent number: 7434686
    Abstract: A surface-mountable storage system for an auto-injection device. The storage system includes a base and a cover. The base has a back surface adapted to be mounted to a generally vertical surface. A support structure secured to the base releasably holds an auto-injection device on end and adjacent the front surface. The cover has a free edge adapted to be substantially continuously adjacent the base. This allows the cover and base to substantially enclose the auto-injection device when the cover is in a closed position with respect to the base. The storage system also has a latch for securing the cover to the base to allow the cover to move between the closed position and an open position that presents the auto-injection device for removal from the support structure.
    Type: Grant
    Filed: December 10, 2004
    Date of Patent: October 14, 2008
    Inventor: Michael Prindle
  • Publication number: 20060169611
    Abstract: The subject invention is directed to a surface-mountable storage system for an auto-injection device. The storage system includes a base and a cover. The base has a back surface adapted to be mounted to a generally vertical surface. A support structure secured to the base releasably holds an auto-injection device on end and adjacent the front surface. The cover has a free edge adapted to be substantially continuously adjacent the base. This allows the cover and base to substantially enclose the auto-injection device when the cover is in a closed position with respect to the base. The storage system also has means for securing the cover to the base to allow the cover to move between the closed position and an open position that presents the auto-injection device for removal from the releasable holding means.
    Type: Application
    Filed: December 10, 2004
    Publication date: August 3, 2006
    Inventor: Michael Prindle