Abstract: A robot comprising a base forming an inner chamber and having an opening, a first link supported by the base and arranged for translational movement generally along a first axis relative to the base, a second link supported by the first link and arranged for rotary motion relative to the first link about a second axis generally parallel to the first axis, the second link extending from the inner chamber through the opening into an outer region, a third link supported by the second link and arranged for rotary motion relative to the second link about a third axis generally parallel to the first axis, a first actuator arranged to control the translational movement of the first link relative to the base, a second actuator arranged to control the rotary motion of the second link relative to the first link, a third actuator supported by the second link and arranged to control the rotary motion of the third link relative to the second link, and a seal between the inner chamber and the outer region arranged to isola

Abstract: An apparatus and a method for baking and cooling silicon substrates are disclosed. Both baking and cooling of silicon substrates are done in a single integrated thermal process module. Each thermal process module includes two hot plate assemblies, a cool plate assembly, two local linear transfer arms and a micro-processor based module controller. Both transfer arms are capable of transferring substrates among the cool and hot plate assemblies. The module controller ensures that there are no conflicts in use of the transfer arms or in use of the hot and cool plate assemblies and so that a transfer arm is always available when a substrate is finished baking. A central substrate handling robot transports substrates only from and to the cool plate assembly of the thermal process module. Also, the vacuum tubing is routed via a unique pulley arrangement to achieve compact mounting and eliminate loose tubing.

Abstract: A substrate photolithography system includes a substrate handling robot that pivots about a fixed point and transfers substrates between photoresist coater, a developer, and a heating/cooling unit, all of which are clustered about the robot. The end effector of the robot is capable of both vertical and lateral movement so that individual modules of the heating/cooling unit may be stacked. For heating/cooling, the substrate is placed in the heating/cooling unit in close proximity to a hotplate/chillplate and a thermally conductive, non-reactive gas, such as helium, is introduced into the airspace between the substrate and the hotplate/chillplate. The thermally conductive, non-reactive gas, is preheated/precooled before introduction into the airspace between the substrate and the hotplate/chillplate when the gas passes through a bore in the hotplate/chillplate. Additionally, the substrate is automatically aligned in a milled recession in the hotplate surface for future handling.

Abstract: A substrate photolithography system includes a substrate handling robot which pivots about a fixed point and transfers substrates between photoresist coater, a developer, and a heating/cooling unit, all of which are clustered about the robot. The end effector of the robot is capable of both vertical and lateral movement so that individual modules of the heating/cooling unit may be stacked. An apparatus and a method for baking and cooling silicon substrates are disclosed. Both baking and cooling of silicon substrates are done in a single integrated thermal process module. Each thermal process module includes two hot plate assemblies, a cool plate assembly, two local linear transfer arms and a micro-processor based module controller. Both transfer arms are capable of transferring substrates among the cool and hot plate assemblies. A cassette input/output unit handles cassettes which contain semiconductor wafers or other substrates that are to be delivered to or withdrawn from a semiconductor processing system.

Abstract: In a photolithography system, baking and cooling of semiconductor substrates is done in a thermal process module that uses a unique mechanism including pulleys to route vacuum tubing to a transfer arm. Specifically, the mechanism includes a pair of pulleys and a vacuum tube wrapped around the pulleys. The vacuum tube has a movable portion connected to the transfer arm which is reciprocable between the pair of pulleys. The vacuum tube also has a stationary portion that is connected to the movable portion to form an endless loop. The stationary portion of the vacuum tube is rigidly connected to a vacuum supply line in the housing of the thermal process module.

Abstract: A cassette input/output unit handles cassettes which contain semiconductor wafers or other substrates that are to be delivered to or withdrawn from a semiconductor processing system. The input/output unit includes a drawer front which rotates 90.degree. about a horizontal axis as it is opened. Thus a cassette containing wafers can easily be placed on the drawer front with the wafers oriented vertically, as they are normally carried, and the cassette will be rotated 90.degree. as the drawer is closed, thereby orienting the wafers horizontally for access by a robot inside the photolithography system. The cassette may also be rotated about a vertical axis within the unit, so that several input/output units may be used with a robot which rotates about a fixed axis. A clamping mechanism grips the cassette firmly when it is placed in the unit.

Abstract: A mobile transport unit for independently operating within an enclosed environment. The transport unit is adapted for carrying a robotic manipulator arm and cargo within the environment, and includes an infrared communications transmitter/receiver for communicating with an extra-vehicular central processing unit. The transport unit includes electric motors for driving and for steering the unit. A laser docking module precisely determines the vehicle's location relative to a fixed point within the environment. Ultrasonic sensors placed about the vehicle can detect objects within a preselected range for collision avoidance and safety purposes. The vehicle is controlled by a central computer which receives inputs from the infrared communications system and from on-board sensors including directional sensors, distance measuring sensors, a gyroscope, the ultrasonic sensors, and the docking module.

Abstract: Apparatus for transferring electrical power between a power supplying apparatus and power consuming apparatus and having a separable high frequency transformer with a primary permanently mounted to the power supply apparatus and a secondary mounted about the power consuming apparatus. A charging control circuit mounted on the consuming apparatus, e.g. a mobile vehicle includes means for detecting current and voltage delivered through the transformer, and also for monitoring storage batteries within the vehicle. The power supply apparatus includes a power supply circuit comprising a ferrite core transformer and capacitor forming a parallel resonant circuit. The primaries of the transformer are alternately driven by a driver about opposing polarities. The drivers are controlled by a voltage-controlled pulse-width modulator which provides a square wave input to the drivers to cause them to alternatively energize the ferrite core transformer.

Abstract: An optical positional sensing apparatus for providing precise position and approach angle of a mobile assembly with respect to a fixed assembly. The apparatus includes a light source and optics to produce a rotating horizontal beam. Optics and a transducer are included which can detect the light beam when reflected back on itself. A corner reflector is affixed to a piece of equipment to which the mobile assembly will travel. The beam is rotated by means of a drive motor. Light hitting the corner reflector is reflected directly back under three circumstances, i.e. when the beam strikes either corner or when the beam is perpendicular to the reflector. A rotary encoder is coupled to the drive mechanism and supplies continuous angular positional data to a microprocessor. The transducer is also coupled to the microprocessor which generates data sets of angular location for each transducer signal. Simple trigonometric calculations provide the desired position and approach angle data.

Abstract: Apparatus used in conjunction with printer document feed mechanisms for allowing the dynamic adjustment of the feed mechanisms while paper feed is occurring, thus adjusting paper tension. The apparatus has a linear adjustment capability over its total range. In particular, adjusting levers are attached to the feed mechanism support shaft, pinions being attached to each end of the shaft. The pinion teeth mesh with the teeth of racks attached to each side plate of the feed mechanism. As the adjusting levers are moved, the support shaft and pinions rotate. The rotation of the pinion meshing with the rack causes the support shaft (and feed mechanism) to move, changing the distance between the feed mechanism and the printer platen. This distance, and paper tension, vary linearly with the angular position of the levers. The paper tension can be adjusted while the feed mechanism is operative.