Patents by Inventor Michael R. Bonsaver

Michael R. Bonsaver has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Transmission line for providing power to an electrode boat in a plasma enhanced chemical vapor deposition system
    Patent number: 5175021
    Abstract: A transmission line is constructed from ceramic and nickel materials to provide a characteristic impedance that matches the characteristic impedance of a boat assembly in a chemical vapor deposition system. The transmission line is interposed between a set of feedthroughs through the wall of a reactant tube and a set of contacts on the boat assembly. The transmission line improves the efficiency of the power transfer to the boat assembly from an RF power source external to the reactant tube. The transmission line is particularly advantageous at high frequencies such as, for example, 13.56 MHz. This improves the repeatability of the deposition of film on wafers in the boat assembly.
    Type: Grant
    Filed: December 12, 1990
    Date of Patent: December 29, 1992
    Assignee: Advanced Semiconductor Materials America, Inc.
    Inventors: Michael R. Bonsaver, Rand A. Conner, David P. Lambert