Patents by Inventor Michael R. Kennett

Michael R. Kennett has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Post metal chemical-mechanical planarization cleaning process
    Patent number: 8920567
    Abstract: A post metal chemical-mechanical planarization (CMP) cleaning process for advanced interconnect technology is provided. The process, which follows CMP, combines an acidic clean and a basic clean in sequence. The process can achieve a more than 60% reduction in CMP defects, such as polish residues, foreign materials, slurry abrasives, scratches, and hollow metal, relative to an all-basic clean process. The process also eliminates the circular ring defects that occur intermittently during roller brush cleans within a roller brush clean module.
    Type: Grant
    Filed: March 6, 2013
    Date of Patent: December 30, 2014
    Assignee: International Business Machines Corporation
    Inventors: Vamsi Devarapalli, Colin J. Goyette, Michael R. Kennett, Mahmoud Khojasteh, Qinghuang Lin, James J. Steffes, Adam D. Ticknor, Wei-tsu Tseng
  • POST METAL CHEMICAL-MECHANICAL PLANARIZATION CLEANING PROCESS
    Publication number: 20140256133
    Abstract: A post metal chemical-mechanical planarization (CMP) cleaning process for advanced interconnect technology is provided. The process, which follows CMP, combines an acidic clean and a basic clean in sequence. The process can achieve a more than 60% reduction in CMP defects, such as polish residues, foreign materials, slurry abrasives, scratches, and hollow metal, relative to an all-basic clean process. The process also eliminates the circular ring defects that occur intermittently during roller brush cleans within a roller brush clean module.
    Type: Application
    Filed: March 6, 2013
    Publication date: September 11, 2014
    Applicant: International Business Machines Corporation
    Inventors: Vamsi Devarapalli, Colin J. Goyette, Michael R. Kennett, Mahmoud Khojasteh, Qinghuang Lin, James J. Steffes, Adam D. Ticknor, Wei-tsu Tseng