Patents by Inventor Michael R. Serbin

Michael R. Serbin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical waveguide devices and method of fabrication
    Publication number: 20030091257
    Abstract: The invention is an optical waveguide device and method of fabrication, where the device includes a pyroelectric substrate such as lithium niobate, a waveguide formed in the substrate, a buffer layer formed over the substrate, and at least one electrode formed over the buffer layer. The device further includes a dielectric diffusion barrier layer formed between the substrate and the buffer layer. The dielectric material is preferably a fluorine-doped nitride or a deuterated nitride.
    Type: Application
    Filed: November 10, 2001
    Publication date: May 15, 2003
    Inventors: Utpal Kumar Chakrabarti, Julia C. Duncan, Kevin Cyrus Robinson, Michael R. Serbin, Yiu-Man Wong