Patents by Inventor Michael R. Woolston

Michael R. Woolston has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for treatment of chemical mechanical polishing fluid
    Patent number: 7947170
    Abstract: Embodiments of the invention generally provide a method and an apparatus for treating waste effluents from substrate polishing processes, such as from an electrochemical mechanical polishing (ECMP) process. In one embodiment, a method for treating a waste effluent mixture generated during a substrate process is provided which includes flowing a waste effluent comprising chelated metal complexes from a substrate process system, combining an oxidizing agent and the waste effluent to produce free chelators, flowing the waste effluent through an organoclay media and an activated carbon media to remove the free chelators, and flowing the waste effluent through an anion exchange resin to remove metal ions and produce a waste water.
    Type: Grant
    Filed: August 27, 2007
    Date of Patent: May 24, 2011
    Assignee: Applied Materials, Inc.
    Inventors: Josh H. Golden, Peter I. Porshvev, Michael R. Woolston, Cormac Kissane