Patents by Inventor Michael Randall Fallows

Michael Randall Fallows has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for venting gas between a crucible and a susceptor
    Patent number: 8496752
    Abstract: During a CZ or similar process, a silica crucible is held in a graphite or similar susceptor while being heated to above between about 1580 and 1620 degrees C. Vents or grooves formed in at least one of the outer surface of the crucible and the inner surface of the susceptor permit gasses to vent upwardly and out from between the crucible and susceptor. This permits gas evolved from the crucible as a result of the heat to be vented rather than expanding between the crucible and susceptor thereby deforming the crucible.
    Type: Grant
    Filed: September 2, 2009
    Date of Patent: July 30, 2013
    Assignee: Heraeus Shin-Etsu America, Inc.
    Inventors: Katsuhiko Kemmochi, Robert Joseph Coolich, Michael Randall Fallows
  • METHOD AND APPARATUS FOR VENTING GAS BETWEEN A CRUCIBLE AND A SUSCEPTOR
    Publication number: 20110048315
    Abstract: During a CZ or similar process, a silica crucible is held in a graphite or similar susceptor while being heated to above between about 1580 and 1620 degrees C. Vents or grooves formed in at least one of the outer surface of the crucible and the inner surface of the susceptor permit gasses to vent upwardly and out from between the crucible and susceptor. This permits gas evolved from the crucible as a result of the heat to be vented rather than expanding between the crucible and susceptor thereby deforming the crucible.
    Type: Application
    Filed: September 2, 2009
    Publication date: March 3, 2011
    Applicant: Heraeus Shin-Etsu America, Inc.
    Inventors: Katsuhiko Kemmochi, Robert Joseph Coolich, Michael Randall Fallows