Patents by Inventor Michael Rice

Michael Rice has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11110425
    Abstract: Apparatus and methods for providing high velocity gas flow showerheads for deposition chambers are described. The showerhead has a faceplate in contact with a backing plate that has a concave portion to provide a plenum between the backing plate and the faceplate. A plurality of thermal elements is within the concave portion of the backing plate and extends to contact the faceplate.
    Type: Grant
    Filed: July 26, 2019
    Date of Patent: September 7, 2021
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Jared Ahmad Lee, Sanjeev Baluja, Joseph AuBuchon, Dhritiman Subha Kashyap, Michael Rice
  • Patent number: 11098404
    Abstract: Multi-station process chamber lids comprising a plurality of station openings are described. A station separation purge channel is around the station openings. A plurality of angular purge channels separate station openings from adjacent station openings. A lid support beam can compensate for deflection of the chamber lid body.
    Type: Grant
    Filed: September 27, 2019
    Date of Patent: August 24, 2021
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Dhritiman Subha Kashyap, Gopu Krishna, Sanjeev Baluja, Michael Rice
  • Publication number: 20210250001
    Abstract: A packaged RF power amplifier (RFPA) configured to increase video bandwidth is disclosed as well is a process for implementing a RF power device to increase video bandwidth. The RF power device including at least one transistor; an output matching circuit coupled to an output lead and to the at least one transistor; at least one bias feed circuit coupled to the at least one transistor; and at least one coaxial resonator coupled between the at least one transistor and the at least one bias feed circuit.
    Type: Application
    Filed: February 6, 2020
    Publication date: August 12, 2021
    Inventor: David Michael Rice
  • Publication number: 20210087681
    Abstract: Apparatus and methods to process one or more substrates are described. A plurality of process stations are arranged in a circular configuration around a rotational axis. A support assembly with a rotatable center base defining a rotational axis, at least two support arms extending from the center base and heaters on each of the support arms is positioned adjacent the processing stations so that the heaters can be moved amongst the various process stations to perform one or more process condition. The support assembly configured to offset the position of the substrate with respect to the processing stations.
    Type: Application
    Filed: September 18, 2020
    Publication date: March 25, 2021
    Applicant: Applied Materials, Inc.
    Inventors: Joseph AuBuchon, Sanjeev Baluja, Michael Rice, Arkaprava Dan, Hanhong Chen
  • Publication number: 20200392621
    Abstract: Apparatus and methods to process one or more wafers are described. A processing chamber comprises a first processing station comprising a first gas injector having a first face, a first emissivity and a first temperature, a second processing station comprising a second gas injector having a second face, a second emissivity and a second temperature, and a substrate support assembly comprising a plurality of substantially coplanar support surfaces, the substrate support assembly configured to move the support surfaces between the first processing station and the second processing station. When a wafer is on the support surfaces, a temperature skew of less than about 0.5° C. is developed upon moving the wafer between the stations in about 0.5 seconds.
    Type: Application
    Filed: August 25, 2020
    Publication date: December 17, 2020
    Applicant: Applied Materials, Inc
    Inventors: Joseph AuBuchon, Sanjeev Baluja, Dhritiman Subha Kashyap, Jared Ahmad Lee, Tejas Ulavi, Michael Rice
  • Patent number: 10787739
    Abstract: Apparatus and methods to process one or more wafers are described. A processing chamber comprises a first processing station comprising a first gas injector having a first face, a first emissivity and a first temperature, a second processing station comprising a second gas injector having a second face, a second emissivity and a second temperature, and a substrate support assembly comprising a plurality of substantially coplanar support surfaces, the substrate support assembly configured to move the support surfaces between the first processing station and the second processing station. When a wafer is on the support surfaces, a temperature skew of less than about 0.5° C. is developed upon moving the wafer between the stations in about 0.5 seconds.
    Type: Grant
    Filed: October 21, 2019
    Date of Patent: September 29, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Joseph AuBuchon, Sanjeev Baluja, Dhritiman Subha Kashyap, Jared Ahmad Lee, Tejas Ulavi, Michael Rice
  • Patent number: 10769129
    Abstract: Techniques for tracking function usage in an enterprise system are provided. The techniques include executing a set of processes in one or more applications on one or more computer systems. Next, a set of threads in each process is used to track, in a hash table stored in memory on a computer system, calls to a set of functions by the process. A thread in the process is then used to update a data store containing usage data for the process with the tracked calls in the hash table.
    Type: Grant
    Filed: February 28, 2018
    Date of Patent: September 8, 2020
    Assignee: Oracle International Corporation
    Inventors: Pradip Kumar Pandey, Ira Foster Bindley, John David Holder, Brett Weston McGarity, Jason Michael Rice
  • Publication number: 20200256228
    Abstract: Exhaust systems for handling multiple effluent streams are described. Some embodiments include pressure drops to prevent perturbations from one effluent source from affecting a second effluent source. Some embodiments incorporate an exhaust assembly with multiple inlets and pumps and a single outlet. The exhaust assembly includes shared auxiliary components like purge and cooling systems.
    Type: Application
    Filed: February 13, 2020
    Publication date: August 13, 2020
    Applicant: Applied Materials, Inc.
    Inventors: Michael Rice, Sanjeev Baluja, Joseph AuBuchon, Hari Ponnekanti, Mario D. Silvetti, Kevin Griffin
  • Patent number: 10648964
    Abstract: In some embodiments, alerts are sent to appropriate parties if an insulated container is not properly packed out to insure the approximate safe temperature of the materials. In other embodiments, a countdown timer is used to keep track of the time that the biologic has been in transit, and ensure that the amount of time does not exceed the known shelf life of the biologic. In still other embodiments, the payload container is equipped with its own sensors, such as temperature sensors, and communications devices, such as a close range communication device, capable of transmitting information regarding a range of parameters, including, but not limited to, temperature, humidity, location and time, from the payload container to an end user. In other embodiments, shielding and/or radiation sensors are included in insulated shipping or storage containers, or payload containers, to shield and monitor the radiation exposure of the payload.
    Type: Grant
    Filed: May 19, 2016
    Date of Patent: May 12, 2020
    Assignee: Biologistex CCM, LLC
    Inventors: Michael Rice, Bruce McCormick, Aby J. Mathew, Kevin O'Donnell
  • Publication number: 20200131636
    Abstract: Apparatus and methods to process one or more wafers are described. A first processing station has a first gas flow pattern from one or more of a first gas diffuser, a first cooling channel pattern, or a first heater. A second processing station has a second gas flow pattern from one or more of a second gas diffuser, a second cooling channel pattern, or a second heater. The second gas diffuser, the second cooling channel pattern, or the second heater is rotated or translated relative to the first gas diffuser, the first cooling channel pattern, or the first heater to provide the second gas flow pattern complementary to the first gas flow pattern.
    Type: Application
    Filed: October 21, 2019
    Publication date: April 30, 2020
    Inventors: Joseph AuBuchon, Sanjeev Baluja, Michael Rice, Arkaprava Dan, Hanhong Chen
  • Publication number: 20200131635
    Abstract: Apparatus and methods to process one or more wafers are described. A processing chamber comprises a first processing station comprising a first gas injector having a first face, a first emissivity and a first temperature, a second processing station comprising a second gas injector having a second face, a second emissivity and a second temperature, and a substrate support assembly comprising a plurality of substantially coplanar support surfaces, the substrate support assembly configured to move the support surfaces between the first processing station and the second processing station. When a wafer is on the support surfaces, a temperature skew of less than about 0.5° C. is developed upon moving the wafer between the stations in about 0.5 seconds.
    Type: Application
    Filed: October 21, 2019
    Publication date: April 30, 2020
    Inventors: Joseph AuBuchon, Sanjeev Baluja, Dhritiman Subha Kashyap, Jared Ahmad Lee, Tejas Ulavi, Michael Rice
  • Publication number: 20200102651
    Abstract: Multi-station process chamber lids comprising a plurality of station openings are described. A station separation purge channel is around the station openings. A plurality of angular purge channels separate station openings from adjacent station openings. A lid support beam can compensate for deflection of the chamber lid body.
    Type: Application
    Filed: September 27, 2019
    Publication date: April 2, 2020
    Inventors: Dhritiman Subha Kashyap, Gopu Krishna, Sanjeev Baluja, Michael Rice
  • Publication number: 20200090978
    Abstract: Apparatus and methods to process one or more wafers are described. A spatial deposition tool comprises a plurality of substrate support surfaces on a substrate support assembly and a plurality of spatially separated and isolated processing stations. The spatially separated isolated processing stations have independently controlled temperature, processing gas types, and gas flows. In some embodiments, the processing gases on one or multiple processing stations are activated using plasma sources. The operation of the spatial tool comprises rotating the substrate assembly in a first direction, and rotating the substrate assembly in a second direction, and repeating the rotations in the first direction and the second direction until a predetermined thickness is deposited on the substrate surface(s).
    Type: Application
    Filed: October 25, 2019
    Publication date: March 19, 2020
    Inventors: Joseph AuBuchon, Sanjeev Baluja, Michael Rice, Arkaprava Dan, Hanhong Chen
  • Publication number: 20200066572
    Abstract: Apparatus and methods to process one or more wafers are described. A spatial deposition tool comprises a plurality of substrate support surfaces on a substrate support assembly and a plurality of spatially separated and isolated processing stations. The spatially separated isolated processing stations have independently controlled temperature, processing gas types, and gas flows. In some embodiments, the processing gases on one or multiple processing stations are activated using plasma sources. The operation of the spatial tool comprises rotating the substrate assembly in a first direction, and rotating the substrate assembly in a second direction, and repeating the rotations in the first direction and the second direction until a predetermined thickness is deposited on the substrate surface(s).
    Type: Application
    Filed: October 25, 2019
    Publication date: February 27, 2020
    Inventors: Joseph AuBuchon, Sanjeev Baluja, Michael Rice, Arkaprava Dan, Hanhong Chen
  • Patent number: 10566226
    Abstract: Embodiments of multi-cassette carrying cases are provided herein. In some embodiments a multi-cassette carrying case includes: a body having an inner volume; a door coupled to the body to selectively seal off the inner volume; and a plurality of cassette holders disposed in the inner volume to hold one or more substrate cassettes. In some embodiments, a method of transferring substrates includes: placing a substrate in a substrate cassette, wherein an inner volume of the substrate cassette is sealed from an environment outside of the substrate cassette; and placing the substrate cassette in a multi-cassette carrying case.
    Type: Grant
    Filed: November 5, 2015
    Date of Patent: February 18, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Sriskantharajah Thirunavukarasu, Eng Sheng Peh, Srinivas D. Nemani, Arvind Sundarrajan, Avinash Avula, Ellie Y. Yieh, Michael Rice, Ginetto Addiego
  • Publication number: 20200030766
    Abstract: Apparatus and methods for providing high velocity gas flow showerheads for deposition chambers are described. The showerhead has a faceplate in contact with a backing plate that has a concave portion to provide a plenum between the backing plate and the faceplate. A plurality of thermal elements is within the concave portion of the backing plate and extends to contact the faceplate.
    Type: Application
    Filed: July 26, 2019
    Publication date: January 30, 2020
    Inventors: Jared Ahmad Lee, Sanjeev Baluja, Joseph AuBuchon, Dhritiman Subha Kashyap, Michael Rice
  • Publication number: 20190332129
    Abstract: Gas distribution apparatus to provide uniform flows of gases from a single source to multiple processing chambers are described. A regulator is positioned at an upstream end of a shared volume having a plurality of downstream ends. A flow controller is positioned at each downstream end of the shared volume, the flow controller comprising an orifice and a fast pulsing valve. Methods of using the gas distribution apparatus and calibrating the flow controllers are also described.
    Type: Application
    Filed: April 27, 2019
    Publication date: October 31, 2019
    Inventors: Michael Rice, Joseph AuBuchon, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez, Ming Xu, Marcel E. Josephson, Sushant Suresh Koshti, Kenneth Le, Kevin M. Brashear
  • Publication number: 20190326147
    Abstract: Embodiments of a multi-cassette carrying case are provided herein. In some embodiments a method for transporting a substrate from a first processing device to a second processing device includes docking a substrate cassette to a first chamber; pumping down pressure in the substrate cassette; transferring a substrate through the first chamber to the substrate cassette; sealing the substrate cassette and moving the substrate cassette having the substrate disposed therein from the first chamber to a second chamber; docking the substrate cassette to the second chamber; and transferring the substrate from the substrate cassette through the second chamber.
    Type: Application
    Filed: June 5, 2019
    Publication date: October 24, 2019
    Inventors: SRISKANTHARAJAH THIRUNAVUKARASU, ENG SHENG PEH, SRINIVAS D. NEMANI, ARVIND SUNDARRAJAN, AVINASH AVULA, ELLIE Y. YIEH, MICHAEL RICE, GINETTO ADDIEGO
  • Publication number: 20190131167
    Abstract: Apparatus and methods to process one or more wafers are described. A plurality of process stations are arranged in a circular configuration around a rotational axis. A support assembly with a rotatable center base defining a rotational axis, at least two support arms extending from the center base and heaters on each of the support arms is positioned adjacent the processing stations so that the heaters can be moved amongst the various process stations to perform one or more process condition.
    Type: Application
    Filed: October 26, 2018
    Publication date: May 2, 2019
    Inventors: Michael Rice, Joseph AuBuchon, Sanjeev Baluja, Mandyam Sriram
  • Publication number: 20190102417
    Abstract: Techniques for tracking function usage in an enterprise system are provided. The techniques include executing a set of processes in one or more applications on one or more computer systems. Next, a set of threads in each process is used to track, in a hash table stored in memory on a computer system, calls to a set of functions by the process. A thread in the process is then used to update a data store containing usage data for the process with the tracked calls in the hash table.
    Type: Application
    Filed: February 28, 2018
    Publication date: April 4, 2019
    Applicant: Oracle International Corporation
    Inventors: Pradip Kumar Pandey, Ira Foster Bindley, John David Holder, Brett Weston McGarity, Jason Michael Rice