Patents by Inventor Michael Robert Biagetti

Michael Robert Biagetti has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for creating wafer batches in an automated batch process tool
    Patent number: 7890202
    Abstract: A method of batching substrates in an automated processing tool, the automated process tool and a system for batching substrates in the automated process tool. The method includes selecting a first container containing a first group of substrates; simultaneously transferring each substrate of the first group of substrates into a batching station of the automated processing tool; selecting a second container containing a second group of substrates; selecting less than all substrates of the second group of substrates; and transferring each substrate of the less than all substrates of the second group of substrates to the batching station to form a third group of substrates.
    Type: Grant
    Filed: October 16, 2007
    Date of Patent: February 15, 2011
    Assignee: International Business Machines Corporation
    Inventors: Russell Herbert Arndt, Michael Robert Biagetti, Robert J. MacHugh, Charles Jesse Taft
  • METHOD FOR CREATING WAFER BATCHES IN AN AUTOMATED BATCH PROCESS TOOL
    Publication number: 20090099681
    Abstract: A method of batching substrates in an automated processing tool, the automated process tool and a system for batching substrates in the automated process tool. The method includes selecting a first container containing a first group of substrates; simultaneously transferring each substrate of the first group of substrates into a batching station of the automated processing tool; selecting a second container containing a second group of substrates; selecting less than all substrates of the second group of substrates; and transferring each substrate of the less than all substrates of the second group of substrates to the batching station to form a third group of substrates.
    Type: Application
    Filed: October 16, 2007
    Publication date: April 16, 2009
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Russell Herbert Arndt, Michael Robert Biagetti, Robert J. MacHugh, Charles Jesse Taft