Abstract: A real time monitoring and control system for single or multi-fired combustion systems which permits adjustment of the air fuel ratio in the system for optimized efficiency and minimized pollution content in the exhaust gas, while providing safety control of the combustion process. The system includes a high sensitivity light sensor which is utilized to monitor the combustion flame and provide an electrical output proportional to flame temperature, that is utilized to control the air fuel ratio of the system. The wavelength sensitivity of the sensor is capable of selection, for example by selection of sensor type and/or use of appropriate filters, to monitor a predetermined range or region of the flame emission spectrum in order to enable correlation of the intensity of the emission spectrum of the type of fuel being utilized, i.e., oil or natural gas, with temperature and combustion efficiency.

Abstract: A method and resulting structure for a relative humidity monitor which can be built into an integrated circuit chip. A small area on a silicon chip is made porous by anodic etching. This region is then oxidized and a metal counter electrode is deposited over part of the porous area. The surface area in the dielectric under the counter electrode is very high and because of the openness of the structure, ambient moisture can quickly diffuse into the dielectric under the electrode and adsorb onto the silicon dioxide surface. Changes in ambient humidity will then be reflected by measurable changes in capacitance or conductance of the device.