Patents by Inventor Michael RONDE

Michael RONDE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
    Publication number: 20190129317
    Abstract: An apparatus having: a system configured to measure an object; a base structure; an object support constructed to hold the object, the object support movably supported on the base structure; a balance mass configured to absorb a reaction force arising from movement of the object support; an actuator connected to the balance mass and the base structure, the actuator configured to apply a force to the balance mass and the base structure; a sensor configured to produce a signal for a measured characteristic of the base structure corresponding to a disturbance, or its effect, acting on the base structure; and a control system configured to determine, based on at least the signal for the measured characteristic of the base structure, a signal for the actuator to apply a force to the base structure and/or the balance mass.
    Type: Application
    Filed: December 13, 2018
    Publication date: May 2, 2019
    Applicant: ASML Netherlands B.V
    Inventors: Michael RONDE, Lucas KUINDERSMA, Niels BOSCH, Hans BUTLER, Cornelius Adrianus Lambertus DE HOON, Marc Wilhelmus Maria VAN DER WIJST, Thijs VERHEES, Sander KERSSEMAKERS