Abstract: An electrostatic ion trap or an array of electrostatic ion traps are provided having a longitudinal length of no more than 10 mm and/or at least one electrode with a capacitance to ground of no more than 1 pF. First and second sets of planar electrodes may be distributed along the longitudinal axis, at least some of the which are configured to receive an electrostatic potential for confinement of ions received in the space between the first and second sets of planar electrodes. An array may comprise an inlet for receiving an ion beam such that a portion of the ion beam can be trapped in each of the ion traps. Signals indicative of ion mass and charge data may be obtained from multiple electrostatic ion traps in the array. This mass and charge data may be combined for identification of components of a mixture of different analyte ions.

Abstract: An electrostatic ion trap or an array of electrostatic ion traps are provided having a longitudinal length of no more than 10 mm and/or at least one electrode with a capacitance to ground of no more than 1 pF. First and second sets of planar electrodes may be distributed along the longitudinal axis, at least some of the which are configured to receive an electrostatic potential for confinement of ions received in the space between the first and second sets of planar electrodes. An array may comprise an inlet for receiving an ion beam, configured such that a portion of the ion beam can be trapped in each of the ion traps. Signals indicative of ion mass and charge data may be obtained from multiple electrostatic ion traps in the array. This mass and charge data may be combined for identification of components of a mixture of different analyte ions.

Abstract: An ion focusing device comprising an ion collection element comprising a plurality of N curved electrodes extending around an axis of the ion collection element and an aperture on an axis of the ion collection element. A multipole ion guide adjacent the ion collection element and having a plurality of N elongate electrodes extending parallel to and around an axis of the multipole ion guide, wherein the axis of the multipole ion guide coincides with the axis of the ion collection element, wherein each of the N curved electrodes of the ion collection element are configured to receive a radio frequency, RF, signal having the same phase as an RF signal configured to be applied to at least one elongate electrode of the plurality of elongate electrodes of the multipole ion guide, and further wherein at least two of the N electrodes of the ion collection element are configured to receive RF signals of a different phase.

Abstract: An electrostatic ion trap or an array of electrostatic ion traps are provided having a longitudinal length of no more than 10 mm and/or at least one electrode with a capacitance to ground of no more than 1 pF. First and second sets of planar electrodes may be distributed along the longitudinal axis, at least some of the which are configured to receive an electrostatic potential for confinement of ions received in the space between the first and second sets of planar electrodes. An array may comprise an inlet for receiving an ion beam, configured such that a portion of the ion beam can be trapped in each of the ion traps. Signals indicative of ion mass and charge data may be obtained from multiple electrostatic ion traps in the array. This mass and charge data may be combined for identification of components of a mixture of different analyte ions.

Abstract: The present invention relates to a system for analyzing particles, the system comprising: a NEMS device comprising at least one NEMS sensor for detecting particles impacting the at least one NEMS sensor, each NEMS sensor comprising a NEMS sensor area, a particle lens assembly, the particle lens assembly comprising at least one particle lens for focusing particles onto a NEMS sensor of the at least one NEMS sensor, wherein the particle lens assembly is spaced from the at least one NEMS sensor area by a separation distance, wherein the system is configured to sustain a space defined between the particle lens assembly and the NEMS device at a pressure where a mean free path for a reference particle is greater than the separation distance. The present invention also relates to a corresponding method.

Abstract: The present invention relates to a system for analyzing particles, the system comprising: a NEMS device comprising at least one NEMS sensor for detecting particles impacting the at least one NEMS sensor, each NEMS sensor comprising a NEMS sensor area, a particle lens assembly, the particle lens assembly comprising at least one particle lens for focusing particles onto a NEMS sensor of the at least one NEMS sensor, wherein the particle lens assembly is spaced from the at least one NEMS sensor area by a separation distance, wherein the system is configured to sustain a space defined between the particle lens assembly and the NEMS device at a pressure where a mean free path for a reference particle is greater than the separation distance. The present invention also relates to a corresponding method.

Abstract: A nano electro-mechanical system (NEMS) formed on a substrate is provided including at least one fixed part associated with the substrate and at least one movable part in relation to the substrate, the system including a transduction component configured to excite the movable part to confer on it a movement and/or to detect a movement of the movable part, the transduction component including at least one electrically conductive material. The electrically conductive material is made of an AlSi alloy based deposition, the deposition being supported at least in part by the movable part of the system.

Abstract: The invention relates to a nano electro- mechanical system (NEMS) formed on a substrate (21) and comprising at least one fixed part associated with the substrate and at least one movable part (23) in relation to the substrate, said system comprising transduction means (24) capable of exciting the movable part to confer on it a movement and/or to detect a movement of movable part, the transduction means comprising at least one electrically conductive material. The electrically conductive material is made of an AlSi alloy based deposition, said deposition being supported at least in part by the movable part of the system.

Abstract: A biosensor is comprised of a free and a biofunctionalized recognition self-sensing nanocantilever, a dock adjacent to the ends of the nanocantilevers, and a gap between the nanocantilevers and dock. The self-sensing cantilevers each include a semiconductor piezoresistor defined in a pair of legs about which the cantilevers flex. A bias power or current is applied to the piezoresistor. The sensitivity of the cantilevers is optimized for a given ambient temperature and geometry of the cantilevers and dock by minimizing the force spectral density, SF, of the cantilevers to determine the optimum bias power, Pin. A sub-aN/?Hz force sensitivity is obtained by scaling down the dimensions of the cantilevers and supplying an optimum bias power as a function of temperature and geometry.

Abstract: A method by which silicon nanostructures may be selectively coated with molecules or biomolecules using an electrochemical process. This chemical process may be employed as a method for coating many different nanostructures within a circuit, each with a different molecular or biomolecular material. The density of devices within a circuit of devices that can be coated with different molecules is limited only by the ability to electronically address each device separately. This invention has applications toward the fabrication of molecular electronic circuitry and toward the fabrication of nanoelectronic molecular sensor arrays.

Abstract: Systems and methods for thermally actuating piezoresistive cantilevers are described. One embodiment includes a nanoelectromechanical resonator connected in at least one location to a substrate, an electrically conductive path formed on the resonator and a signal source connected to the electrically conductive path and configured to provide an oscillating actuation signal capable of exciting a resonant mode in the resonator.

Abstract: Microcalorimeters having low addendum heat capacities and attojoule/Kscale resolutions are provided. These microcalorimeters make use of very small calorimeter bodies composed of materials with very low heat capacities. Also provided are polymer-based microcalorimeters with thermally isolated reagent chambers. These microcalorimeters use a multi-layered polymer membrane structure to provide improved thermal isolation of a reagent chamber.

Abstract: A bioNEMS device comprises a piezoresistive cantilever having flexing legs of which attach the cantilever to a support and a biofunctionalized portion at the tip. A bias current applied to the legs is limited by a maximal acceptable temperature increase at the biofunctionalized tip. The length of the cantilever has a magnitude chosen to minimize background Johnson noise. A catalyzed receptor on the device binds to a ligand whose binding rate coefficient is enhanced. The catalyst lowers the receptor-ligand binding activation energy and is designed by forced evolution to preferentially bind with the ligand. A carrier signal is injected by a magnetic film disposed on the cantilever which is electromagnetically coupled to a source of the carrier signal. A plurality of NEMS fluidicly coupled transducers generate a plurality of output signals from which a collective output signal is derived, either by averaging or thresholding.

Abstract: A method for fabricating parylene coated microfluidic valves is disclosed. A three-dimensional mold made of a first wax is formed. A sacrificial material made of a second wax is provided as a temporary support and then dissolved. A parylene coating is deposited onto the mold. A component material is poured onto the mold and cured, and the first wax is melted away. Further, a method for parylene coating of two-dimensional microfluidic components comprises: forming a lithographic mold of a microfluidic component, the mold made of a photoresist material; coating the lithographic mold with parylene; and removing the lithographic mold.

Abstract: Provided are methods and systems for a rational concatenation of specific classes of proven microfluidic-based protocols to enable a systems approach to repetitive, synchronous analyte detection via a pristine detection array under programmed and/or automatic control.

Abstract: An outputs signal, v(t), is generated from a bioNEMs transducer and mixed with a reference signal and then filtered to generate a correlator output, r(t). The correlator output is detected to generate a signal u(t) and then determined whether the signal u(t) satisfies a predetermined threshold. If qualified, it is then decided whether the signal u(t) represents a predetermined type of interaction between a free ligand in a fluid in which the NEMS device is immersed and a receptor attached to the transducer. The threshold is the Neyman-Pearson criterion based on a predetermined probability of false detection, Pfa. The interaction may be binding of a free ligand to the receptor or releasing a bound ligand from the receptor by competitive binding with the free ligand. The step of detecting comprises detecting the envelope of the signal, r(t).

Abstract: A MEMS system, such as a biosensor, includes a micromechanical resonator and a piezoresistive sensing element which includes an organic semiconductor, such as an organic thin film transistor.

Abstract: A doubly clamped beam has an asymmetric piezoelectric layer within the beam with a gate proximate to the beam within a submicron distance with a gate and beam dipole. A suspended beam is formed using a Cl2/He plasma etch supplied at a flow rate ratio of 1:9 respectively into a plasma chamber. A parametric amplifier comprises a NEMS signal beam driven at resonance and a pair of pump beams driven at twice resonance to generate a modulated Lorentz force on the pump beams to perturb the spring constant of the signal beam. A bridge circuit provides two out-of-phase components of an excitation signal to a first and second NEMS beam in a first and second arm. A DC current is supplied to an AC driven NEMS device to tune the resonant frequency.

Abstract: Thin metallic films are used as the piezoresistive self-sensing element in microelectromechanical and nanoelectromechanical systems. The specific application to AFM probes is demonstrated.

Abstract: Ferromagnetic semiconductor-based sensor devices, including sensors for detecting pressure changes and sensors for detecting magnetic fields, such as switching events in a magnetic recording medium. The pressure sensors of the present invention detect pressure changes using magnetoresistive measurement techniques, and in particular GPHE techniques. Magnetic field detection sensors such as magnetic switching detection sensors include ferromagnetic semiconductor-based materials that provide enhanced sensitivity relative to known materials and techniques. Such magnetic switching detection sensors according to the present invention are particularly useful as a read head sensor for HDD and other magnetic storage technologies.