Patents by Inventor Michael Roy Scheuermann

Michael Roy Scheuermann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gray scale etching for thin flexible interposer
    Patent number: 6156484
    Abstract: Disclosed is a sculpted probe pad and a gray scale etching process for making arrays of such probe pads on a thin flexible interposer for testing the electrical integrity of microelectronic devices at terminal metallurgy. Also used in the etching process is a novel fixture for holding the substrate and a novel mask for 1-step photolithographic exposure. The result of the invention is an array of test probes of preselected uniform topography, which make ohmic contact at all points to be tested simultaneously and nondestructively.
    Type: Grant
    Filed: February 11, 1998
    Date of Patent: December 5, 2000
    Assignee: International Business Machines Corporation
    Inventors: Ernest Bassous, Gobinda Das, Frank Daniel Egitto, Natalie Barbara Feilchenfeld, Elizabeth F. Foster, Stephen Joseph Fuerniss, James Steven Kamperman, Donald Joseph Mikalsen, Michael Roy Scheuermann, David Brian Stone