Abstract: A quartz crystal microbalance assembly includes a lid of a reactor chamber of an ALD system. A QCM crystal is disposed in a bottom section of a central cavity formed in the lid. A central portion of a front surface of the QCM crystal is exposed to an interior of the reactor chamber. A retainer arranged within the central cavity and above the QCM crystal presses the QCM crystal against a ledge in the lid to form a seal between the front surface of the QCM crystal and the ledge while also establishing electrical contact with the QCM crystal. A flange resides immediately adjacent a top surface of the lid and seals the central cavity while supporting electrical contact with the QCM crystal through the retainer. A transducer external to the reactor chamber and in electrical contact with the QCM crystal through a connector in the flange drives the QCM crystal.

Abstract: An improved ALD system usable for low vapor pressure liquid and sold precursors. The ALD system includes a precursor container and inert gas delivery elements configured to increase precursor vapor pressure within a precursor container by injecting an inert gas pulse into the precursor container while a precursor pulse is being removed to the reaction chamber. A controllable inert gas flow valve and a flow restrictor are disposed along an inert gas input line leading into the precursor container below its fill level. A vapor space is provided above the fill level. An ALD pulse valve is disposed along a precursor vapor line extending between the vapor space and the reaction chamber. Both valves are pulsed simultaneously to synchronously remove precursor vapor from the vapor space and inject inert gas into the precursor container below the fill level.

Abstract: A system for gas sterilization includes a sterilization chamber, a source of sterilant gas, and a sterilant gas remediation mechanism. Embodiments relate to systems and methods for delivering humidified air to a sterilization chamber, systems and methods for removing gaseous NO2 from an exhaust gas stream of a sterilization chamber, systems and methods for removing and replacing a source of sterilant gas, an exhaust gas scrubber and/or supplies for a humidification system. Some embodiments relate to hardware and software for user interface in a sterilizing device and hardware and software for control of a sterilization cycle. Some embodiments relate to chamber, chassis and door configurations of a sterilizer.

Abstract: This invention relates to methods of water and steam management during fuel reforming, as well as related fuel reformers.

Abstract: A lockable lid support that includes a mounting bracket, an arm, pivoting apparatus, and sliding and locking apparatus. The mounting bracket is removably mounted to a lid of a box that is pivotally mounted to a lower portion of the box. The arm is pivotally mounted at one end to the lower portion of the box and slidably and locking mounted at another end to the mounting bracket. The pivoting apparatus pivotally mounts the one end of the arm to the lower portion of the box, so that the lid of the box can be pivoted relative to the lower portion of the box from 0 degrees to 180 degrees. And, the sliding and locking apparatus slidingly and lockingly mounts the other end of the arm to the mounting bracket, so that when the lid of the box is pivoted relative to the lower portion of the box to a desired position the lid of the box is maintained in the desired position.