Patents by Inventor Michael S. Dusablon, Sr.

Michael S. Dusablon, Sr. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Microcavity structures, fabrication processes, and applications thereof
    Patent number: 5514832
    Abstract: A method is presented for controlled formation of microcavities for various semiconductor and micro-machine applications. The method involves the steps of defining a void in a support structure, sealing the void with a resilient gas-permeable material such that a chamber is formed, diffusing gas into the chamber through the gas permeable material to create a pressurized chamber, and then allowing expansion of the pressurized chamber within the resilient material, thereby creating an enlarged cavity. The applications set forth include the production of large capacitors, field isolation structures, tubular sensors for chromatography, pressure sensors, and cooling channels for integrated circuits.
    Type: Grant
    Filed: March 30, 1995
    Date of Patent: May 7, 1996
    Assignee: International Business Machines Corporation
    Inventors: Michael S. Dusablon, Sr., Eric J. White
  • Microcavity structures, fabrication processes, and applications thereof
    Patent number: 5508234
    Abstract: A method is presented for controlled formation of microcavities for various semiconductor and micro-machine applications. The method involves the steps of defining a void in a support structure, sealing the void with a resilient gas-permeable material such that a chamber is formed, diffusing gas into the chamber through the gas permeable material to create a pressurized chamber, and then allowing expansion of the pressurized chamber within the resilient material, thereby creating an enlarged cavity. The applications set forth include the production of large capacitors, field isolation structures, tubular sensors for chromatography, pressure sensors, and cooling channels for integrated circuits.
    Type: Grant
    Filed: October 31, 1994
    Date of Patent: April 16, 1996
    Assignee: International Business Machines Corporation
    Inventors: Michael S. Dusablon, Sr., Eric J. White