Patents by Inventor Michael S. Feltman

Michael S. Feltman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ellipsometer apparatus having measurement compensation
    Patent number: 10254107
    Abstract: An ellipsometer apparatus (10) has a measurement compensation feature. The ellipsometer (10) provides for relative lateral movement between a light source assembly (12) and a specimen holder (14) via a positioner assembly (16) to provide for more accurate measurements of a thin film layer (55) on a specimen member (50).
    Type: Grant
    Filed: April 12, 2017
    Date of Patent: April 9, 2019
    Assignee: Falex Corporation
    Inventors: Andrew Faville, Michael S. Feltman