Patents by Inventor Michael S. Lacy

Michael S. Lacy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for conditioning a polishing pad with sonic energy
    Publication number: 20020086622
    Abstract: A method and apparatus for conditioning a polishing pad is described, wherein the polishing pad has a polishing surface for polishing the semiconductor wafer. The method includes positioning a sonic energy generator above the polishing surface of the polishing pad, and applying sonic energy to the polishing surface of the polishing pad. The apparatus a sonic energy generator adapted to be positioned above the polishing surface, the sonic energy generator including a transducer, and a liquid carrier in flow communication with the transducer, wherein the transducer transmits sonic energy into the liquid carrier and the liquid carrier is applied to the polishing surface of the polishing belt.
    Type: Application
    Filed: February 28, 2001
    Publication date: July 4, 2002
    Applicant: Lam Research Corporation
    Inventors: Allan M. Radman, Alan J. Jensen, Helmuth Treichel, Robert G. Boehm, Michael S. Lacy, Eric A. Dunton