Patents by Inventor Michael S. T. Liu

Michael S. T. Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Self-aligned semiconductor device
    Patent number: 5146304
    Abstract: A method of forming a self-aligned contact to a transistor component located on a semiconductor substrate comprising forming a transistor component opening in a masking layer overlying a semiconductor substrate and using epitaxial lateral overgrowth to form a self-aligned contact, the epitaxial overgrowth beginning in the masking layer opening at an upper surface of the semiconductor substrate and extending normal to and laterally over the masking layer surface.
    Type: Grant
    Filed: June 21, 1991
    Date of Patent: September 8, 1992
    Assignee: Honeywell Inc.
    Inventors: Jerry Yue, Michael S. T. Liu
  • Method for fabricating self-aligned semiconductor devices
    Patent number: 5061644
    Abstract: A method of forming a self-aligned contact to a transistor component located on a semiconductor substrate comprising forming a transistor component opening in a masking layer overlying a semiconductor substrate and using epitaxial lateral overgrowth to form a self-aligned contact, the epitaxial overgrowth beginning in the masking layer opening at an upper surface of the semiconductor substrate and extending normal to and laterally over the masking layer surface.
    Type: Grant
    Filed: September 20, 1990
    Date of Patent: October 29, 1991
    Assignee: Honeywell Inc.
    Inventors: Jerry Yue, Michael S. T. Liu