Patents by Inventor Michael SCHILL

Michael SCHILL has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum pump
    Patent number: 9964121
    Abstract: A vacuum pump, in particular to a turbomolecular pump, has a pump inlet, a pump outlet and a pump space for a gas to be pumped arranged between the pump inlet and the pump outlet, and at least one cooling gas inlet for a cooling gas for cooling the vacuum pump, the pump further having one or more hollow regions for the cooling gas connected in a gas conducting manner to the cooling gas inlet and arranged outside the pump space, wherein the or each hollow region is bounded by at least one component of the vacuum pump to be cooled.
    Type: Grant
    Filed: February 27, 2014
    Date of Patent: May 8, 2018
    Assignee: PFEIFFER VACUUM GMBH
    Inventor: Michael Schill
  • Vacuum pump
    Patent number: 9869319
    Abstract: A vacuum pump includes a pump inlet, a pump outlet, a rotor rotatable about an axis of rotation, at least one process gas pump stage for conveying a process gas present at the pump inlet from the pump inlet to the pump outlet, a motor space, and a drive motor which is arranged in the motor space, is configured for rotationally driving the rotor and which has a motor stator, wherein at least one gas path is provided for the process gas from the pump inlet to the pump outlet which leads through the motor space and which leads at least sectionally along the motor stator or through the motor stator.
    Type: Grant
    Filed: July 23, 2014
    Date of Patent: January 16, 2018
    Assignee: Pfeiffer Vacuum GmbH
    Inventors: Mirko Mekota, Jan Hofmann, Uwe Leib, Michael Schill, Bernhard Koch
  • Vacuum pump
    Publication number: 20150030475
    Abstract: A vacuum pump includes a pump inlet, a pump outlet, a rotor rotatable about an axis of rotation, at least one process gas pump stage for conveying a process gas present at the pump inlet from the pump inlet to the pump outlet, a motor space, and a drive motor which is arranged in the motor space, is configured for rotationally driving the rotor and which has a motor stator, wherein at least one gas path is provided for the process gas from the pump inlet to the pump outlet which leads through the motor space and which leads at least sectionally along the motor stator or through the motor stator.
    Type: Application
    Filed: July 23, 2014
    Publication date: January 29, 2015
    Inventors: Mirko Mekota, Jan Hofmann, Uwe Leib, Michael Schill, Bernhard Koch
  • VACUUM PUMP
    Publication number: 20140241853
    Abstract: A vacuum pump, in particular to a turbomolecular pump, has a pump inlet, a pump outlet and a pump space for a gas to be pumped arranged between the pump inlet and the pump outlet, and at least one cooling gas inlet for a cooling gas for cooling the vacuum pump, the pump further having one or more hollow regions for the cooling gas connected in a gas conducting manner to the cooling gas inlet and arranged outside the pump space, wherein the or each hollow region is bounded by at least one component of the vacuum pump to be cooled.
    Type: Application
    Filed: February 27, 2014
    Publication date: August 28, 2014
    Applicant: Pfeiffer Vacuum GmbH
    Inventor: Michael SCHILL