Patents by Inventor Michael Schrameyer

Michael Schrameyer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • LOW EMISSIVITY ELECTROSTATIC CHUCK
    Publication number: 20140318455
    Abstract: An electrostatic chuck includes a heater and an electrode disposed on the heater. The electrostatic chuck also includes an insulator layer and coating disposed on the insulator, where the coating is configured to support an electrostatic field generated by the electrode system to attract a substrate thereto.
    Type: Application
    Filed: April 26, 2013
    Publication date: October 30, 2014
    Applicant: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Julian G. Blake, Dale K. Stone, Lyudmila Stone, Michael Schrameyer