Patents by Inventor Michael Schrenk

Michael Schrenk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20030040161
    Abstract: An integrated component with integrated metal-insulator-metal capacitor and copper-containing interconnects is produced by, first of all, depositing a dielectric interlayer and an upper electrode on a lower electrode, made from copper, over the entire surface. Then, the metal-insulator-metal capacitor is patterned. The etching stops at the dielectric interlayer, which serves as an etch stop. This avoids short circuits between the upper electrode and the lower electrode.
    Type: Application
    Filed: September 3, 2002
    Publication date: February 27, 2003
    Inventors: Michael Schrenk, Markus Schwerd