Abstract: A magnetron sputtering system includes a substrate mounted within a vacuum chamber. A plurality of cathode assemblies includes a first set of cathode assemblies and a second set of cathode assemblies, and is configured for reactive sputtering. Each cathode assembly includes a target comprising sputterable material and has an at least partially exposed planar sputtering surface. A target support is configured to support the target in the vacuum chamber and rotate the target relative to the vacuum chamber about a target axis. A magnetic field source includes a magnet array. A cathode assemblies controller assembly is operative to actuate the first set of cathode assemblies without actuating the second set of cathode assemblies, and to actuate the second set of cathode assemblies without actuating the first set of cathode assemblies.

Abstract: A magnetron sputtering system includes a substrate mounted within a vacuum chamber. A plurality of cathode assemblies includes a first set of cathode assemblies and a second set of cathode assemblies, and is configured for reactive sputtering. Each cathode assembly includes a target comprising sputterable material and has an at least partially exposed planar sputtering surface. A target support is configured to support the target in the vacuum chamber and rotate the target relative to the vacuum chamber about a target axis. A magnetic field source includes a magnet array. A cathode assemblies controller assembly is operative to actuate the first set of cathode assemblies without actuating the second set of cathode assemblies, and to actuate the second set of cathode assemblies without actuating the first set of cathode assemblies.

Abstract: A magnetron sputtering system includes a substrate mounted within a vacuum chamber. A plurality of cathode assemblies includes a first set of cathode assemblies and a second set of cathode assemblies, and is configured for reactive sputtering. Each cathode assembly includes a target comprising sputterable material and has an at least partially exposed planar sputtering surface. A target support is configured to support the target in the vacuum chamber and rotate the target relative to the vacuum chamber about a target axis. A magnetic field source includes a magnet array. A cathode assemblies controller assembly is operative to actuate the first set of cathode assemblies without actuating the second set of cathode assemblies, and to actuate the second set of cathode assemblies without actuating the first set of cathode assemblies.

Abstract: A magnetron sputtering system includes a substrate mounted within a vacuum chamber. A plurality of cathode assemblies includes a first set of cathode assemblies and a second set of cathode assemblies, and is configured for reactive sputtering. Each cathode assembly includes a target comprising sputterable material and has an at least partially exposed planar sputtering surface. A target support is configured to support the target in the vacuum chamber and rotate the target relative to the vacuum chamber about a target axis. A magnetic field source includes a magnet array. A cathode assemblies controller assembly is operative to actuate the first set of cathode assemblies without actuating the second set of cathode assemblies, and to actuate the second set of cathode assemblies without actuating the first set of cathode assemblies.

Abstract: A cathode assembly for a magnetron sputtering system includes a target comprising sputterable material having an at least partially exposed, substantially planar sputtering or erosion surface and a target support configured to support and move the target during sputtering. In certain exemplary embodiments the cathode assembly further comprises a magnetic field source, e.g., a magnet array behind the target. The target support is configured to move the sputtering surface of the target by rotating or spinning the target in the plane of the sputtering surface, moving the target linearly back-and-forth or otherwise. The target support is configured to move the target relative to the magnetic field source, which may be stationary during sputtering, e.g., relative to the cathode assembly and vacuum chamber in which the sputtering is performed. A sputtering system including such a cathode assembly also is provided. A method of sputtering is further provided, employing such a cathode assembly.

Abstract: A cathode assembly for a magnetron sputtering system includes a target comprising sputterable material having an at least partially exposed, substantially planar sputtering or erosion surface and a target support configured to support and move the target during sputtering. In certain exemplary embodiments the cathode assembly further comprises a magnetic field source, e.g., a magnet array behind the target. The target support is configured to move the sputtering surface of the target by rotating or spinning the target in the plane of the sputtering surface, moving the target linearly back-and-forth or otherwise. The target support is configured to move the target relative to the magnetic field source, which may be stationary during sputtering, e.g., relative to the cathode assembly and vacuum chamber in which the sputtering is performed. A sputtering system including such a cathode assembly also is provided. A method of sputtering is further provided, employing such a cathode assembly.

Abstract: A light source assembly comprises a light pipe, a first color light source at a first tapered light collector, a second light source at a second tapered light collector, and at least a first dichroic filter operative to pass first color light and to reflect second color light toward a light output port. A light valve may be positioned to receive light from the light pipe. One or more light entrances to the light pipe may have a filter, e.g., a short wave pass filter, oriented in a plane generally parallel to the axial optical pathway.

Abstract: A light source assembly comprises a light pipe, a first color light source at a first tapered light collector, a second light source at a second tapered light collector, and at least a first dichroic filter operative to pass first color light and to reflect second color light toward a light output port. A light valve may be positioned to receive light from the light pipe. One or more light entrances to the light pipe may have a filter, e.g., a short wave pass filter, oriented in a plane generally parallel to the axial optical pathway.

Abstract: A light source assembly comprises: a light pipe and one or more tapered light collectors operative to reduce the angular distribution of light entering the light pipe from light sources at one or more ports. Dichroic filters and angle-dependent, wavelength selective pass filters control light flow into and through the light pipe. The tapered light collector is operative to reduce the angular distribution of light entering the light pipe. At least a first dichroic filter positioned in the light pipe optically between first and second light entrances is operative to pass first color light from the first light source toward the light port, and to reflect second color light from the second light source toward the light port.

Abstract: An optical component for gain-flattening multiplexed passband signals amplified with optical pump power, comprises a launch port optical waveguide operative to communicate multiplexed passband signals in a passband wavelength range and optical pump power in a different wavelength range; a thin film demux filter oriented to receive combined multiplexed passband signals and optical pump power from the launch port optical waveguide, and operative to pass the multiplexed passband signals and to reflect the optical pump power; a bypass port optical waveguide operative and oriented to receive and carry optical pump power reflected by the demux filter; a gain-flattening filter positioned to receive from the thin film demux filter and operative to pass the multiplexed passband signals with a desired attenuation profile for gain-flattening; and an output port optical waveguide oriented to receive and operative to carry at least multiplexed passband signals passed by the gain-flattening filter.

Abstract: A color wheel comprises a plurality of light filters mounted on a hub or other mounting surface for rotation. The outer circumferential edge of the filters extend radially beyond the outer circumferential edge of the mounting surface. The mounting surface is beveled at its outer circumferential edge. The filters are mounted by adhesive between each filter and the mounting surface. The adhesive extends into at least a portion of the area between the bevel and the filters. Color wheel assemblies comprise such color wheels mounted to a rotational motor. The outer circumferential edges of the filters are aligned with each other to the same radial distance from the central rotational axis. In certain exemplary embodiments the filters are wedge shaped, having contact with adjacent filters only at their radially outer periphery.

Abstract: An optical component for gain-flattening multiplexed passband signals amplified with optical pump power, comprises a launch port optical waveguide operative to communicate multiplexed passband signals in a passband wavelength range and optical pump power in a different wavelength range; a thin film demux filter oriented to receive combined multiplexed passband signals and optical pump power from the launch port optical waveguide, and operative to pass the multiplexed passband signals and to reflect the optical pump power; a bypass port optical waveguide operative and oriented to receive and carry optical pump power reflected by the demux filter; a gain-flattening filter positioned to receive from the thin film demux filter and operative to pass the multiplexed passband signals with a desired attenuation profile for gain-flattening; and an output port optical waveguide oriented to receive and operative to carry at least multiplexed passband signals passed by the gain-flattening filter.

Abstract: A fiber optic device comprises an optical lens element having a focal length greater than 2 mm, and an optical signal source or receiver mounted at the focal plane of the optical lens element and operative to communicate optical signals with a selectively transparent interference filter through the optical lens element. Methods for the production and use of the fiber optic devices are also disclosed.

Abstract: A gain-flattening filter for in-line compensation of the spectral gain profile of an optical amplifier comprises: a first GFF component having a transmission curve with a spectral loss profile corresponding to the spectral gain profile of an optical amplifier, and a second GFF component having a transmission curve with a spectral loss profile corresponding to the error function of the first GFF component.

Abstract: Improved optical element wafers comprising stacked, optically coupled etalon wafers are disclosed. Each etalon wafer comprises a bulk optic wafer defining the optic cavity between selectively transparent thin film mirror coatings. The bulk optic wafer comprises an optically transparent body, such as a portion of a substrate wafer, along with a wedge correcting coating on at least one of the two surfaces of the optically transparent body and/or a thickness-adjustment layer on one or both surfaces. The bulk optic wafer is a solid, self-supporting body, optically transparent (at the wavelength or wavelengths of interest), whose thickness, i.e., the dimension between the selectively transparent surfaces, defines the cavity spacing of the bulk optic etalon wafer. Methods of making and using the optical element wafers are also disclosed.

Abstract: An optical component array allowing expansion of the occupied bandwidth on an existing optical transmission network without disrupting signal traffic. Wavelength selective filters (16, 30; 20, 34) and optical components, such as amplifiers (18, 32) are arrayed for use with a wavelength division multiplexed optical transmission system to transmit a selected portion of a transmission spectrum to an amplifier path and reflect the remainder of the spectrum. Wavelength selective filters and associated amplifiers are arranged in a cascade configuration with a bypass path (35, 37). Additional wavelength selective filters and amplifiers can be added in the bypass path without disrupting existing signal traffic, and such additions can provide for a remaining bypass path, thus allowing further expansion. This configuration provides an expandable amplifier array with a low initial cost.

Abstract: Optical filter elements and optical systems comprise optically mismatched etalons and optically mismatched stacked, optically coupled etalons that are directly optically coupled, at least one of the etalons or stacked, optically coupled etalons comprising first and second selectively transparent thin film mirror coatings on opposite surfaces of a bulk optic. The optically mismatched etalons can be configured to selectively pass single passbands. The disclosed optical systems optionally comprise other devices optically coupled to the optically mismatched etalons and optionally mismatched stacked, optically coupled etalons.

Abstract: An improved etalon has a bulk optic defining the optic cavity between selectively transparent thin film mirror coatings. The bulk optic comprises an optically transparent body, such as a portion of a substrate wafer, along with a wedge correcting coating on at least one of the two surfaces of the optically transparent body and/or a thickness-adjustment layer on one or both surfaces. The wedge coating establishes high precision parallelism of the selectively transparent surfaces of the etalon. The bulk optic is a solid, self-supporting body, optically transparent (at the wavelength or wavelengths of interest), whose thickness, i.e., the dimension between the selectively transparent surfaces, defines the cavity spacing of the etalon. Optical elements and optical communication systems incorporating the novel etalons are disclosed, as well as methods of producing the etalons.

Abstract: An optical component array that has essentially equal path loss for each channel routed through a switching node in a re-insertion configuration and the bypass channels. An array input carrying a plurality of optical channels is coupled to a first node input. Consistent, low transmission loss through a switching node is achieved by a single fiber-beam-fiber transition. The low transmission loss is summed with other array losses to be within 3 dB of the insertion loss of a bypass path. In a particular configuration, a routing array with three switching nodes is loss-balanced to the bypass path. In another embodiment, a multi-channel filter stub in the bypass path improves residual signal suppression when a node is switched to an add/drop configuration.

Abstract: A fiber optic device comprises an optical lens element having a focal length greater than 2 mm, and an optical signal source or receiver mounted at the focal plane of the optical lens element and operative to communicate optical signals with a selectively transparent interference filter through the optical lens element. Methods for the production and use of the fiber optic devices are also disclosed.