Patents by Inventor Michael Shawn Adams

Michael Shawn Adams has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and apparatus for large diameter wafer handling
    Patent number: 8919563
    Abstract: A front semiconductor opening wafer container for large diameter wafers includes a container portion and a door. The container portion includes a left closed side, a right closed side, a closed back, an open front, and an open interior including a plurality of slots for receiving and containing the wafers. The door is attachable to the container portion to close the open front and selectively latchable to the container portion. The container portion can accommodate large diameter wafers, particularly 450 mm wafers. Optimized sag control is provided as well as enhanced structural rigidity, and wafer seating features.
    Type: Grant
    Filed: March 19, 2013
    Date of Patent: December 30, 2014
    Assignee: Entegris, Inc.
    Inventors: Barry Gregerson, Michael Shawn Adams, Jason Todd Steffens
  • METHODS AND APPARATUSES FOR LARGE DIAMETER WAFER HANDLING
    Publication number: 20110005967
    Abstract: A front opening semiconductor wafer container for large diameter wafers includes a container portion and a door. The container portion includes a left closed side, a right closed side, a closed back, an open front, and an open interior including a plurality of slots for receiving and containing the wafers. The door is attachable to the container portion to close the open front and selectively latchable to the container portion. The container portion includes a means for accommodating large diameter wafers, particularly 450 mm wafers. Optimized sag control is provided as well as enhanced structural rigidity, and wafer seating features.
    Type: Application
    Filed: January 13, 2009
    Publication date: January 13, 2011
    Applicant: ENTEGRIS, INC.
    Inventors: Barry Gregerson, Michael Shawn Adams, Jason Todd Steffens