Patents by Inventor Michael Shillinger

Michael Shillinger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20070236313
    Abstract: Systems and methods for forming an electrostatic MEMS switch include forming a cantilevered beam on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The hermetic seal may be a gold/indium alloy, formed by heating a layer of indium plated over a layer of gold. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate.
    Type: Application
    Filed: August 26, 2005
    Publication date: October 11, 2007
    Applicant: Innovative Micro Technology
    Inventors: Andrew Wallis, John Foster, Paul Rubel, Kimon Rybnicek, Michael Shillinger, Jeffery Summers