Patents by Inventor Michael Silbert

Michael Silbert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Hydrocarbon dielectric heat transfer fluids for microwave plasma generators
    Patent number: 7338575
    Abstract: A process and apparatus for cooling a plasma tube generally includes flowing a hydrocarbon dielectric heat transfer fluid into a space defined by the plasma tube and a concentric tube surrounding the plasma tube. In one embodiment, the hydrocarbon fluid is selected to have a dissipation factor less than 0.002 and a thermal efficiency coefficient greater than or equal to 1.30 kJ/kg*K.
    Type: Grant
    Filed: September 10, 2004
    Date of Patent: March 4, 2008
    Assignee: Axcelis Technologies, Inc.
    Inventors: Richard E. Pingree, Jr., Michael Bruce Colson, Michael Silbert
  • Hydrocarbon dielectric heat transfer fluids for microwave plasma generators
    Publication number: 20060054281
    Abstract: A process and apparatus for cooling a plasma tube generally includes flowing a hydrocarbon dielectric heat transfer fluid into a space defined by the plasma tube and a concentric tube surrounding the plasma tube. In one embodiment, the hydrocarbon fluid is selected to have a dissipation factor less than 0.002 and a thermal efficiency coefficient greater than or equal to 1.30 kJ/kg*K.
    Type: Application
    Filed: September 10, 2004
    Publication date: March 16, 2006
    Inventors: Richard Pingree, Michael Colson, Michael Silbert