Patents by Inventor Michael Smits

Michael Smits has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20080045039
    Abstract: A method is provided for making a FET device in which a nitride layer overlies the PFET gate structure, where the nitride layer has a compressive stress with a magnitude greater than about 2.8 GPa. This compressive stress permits improved device performance in the PFET. The nitride layer is deposited using a high-density plasma (HDP) process, wherein the substrate is disposed on an electrode to which a bias power in the range of about 50 W to about 500 W is supplied. The bias power is characterized as high-frequency power (supplied by an RF generator at 13.56 MHz). The FET device may also include NFET gate structures. A blocking layer is deposited over the NFET gate structures so that the nitride layer overlies the blocking layer; after the blocking layer is removed, the nitride layer is not in contact with the NFET gate structures. The nitride layer has a thickness in the range of about 300-2000 ?.
    Type: Application
    Filed: October 17, 2007
    Publication date: February 21, 2008
    Applicants: INTERNATIONAL BUSINESS MACHINES CORPORATION, NOVELLUS SYSTEMS, INC.
    Inventors: Richard Conti, Ronald Bourque, Nancy Klymko, Anita Madan, Michael Smits, Roy Tilghman, Kwong Wong, Daewon Yang
  • Publication number: 20080036007
    Abstract: A method is provided for making a FET device in which a nitride layer overlies the PFET gate structure, where the nitride layer has a compressive stress with a magnitude greater than about 2.8 GPa. This compressive stress permits improved device performance in the PFET. The nitride layer is deposited using a high-density plasma (HDP) process, wherein the substrate is disposed on an electrode to which a bias power in the range of about 50 W to about 500 W is supplied. The bias power is characterized as high-frequency power (supplied by an RF generator at 13.56 MHz). The FET device may also include NFET gate structures. A blocking layer is deposited over the NFET gate structures so that the nitride layer overlies the blocking layer; after the blocking layer is removed, the nitride layer is not in contact with the NFET gate structures. The nitride layer has a thickness in the range of about 300-2000 ?.
    Type: Application
    Filed: October 19, 2007
    Publication date: February 14, 2008
    Applicants: INTERNATIONAL BUSINESS MACHINES CORPORATION, NOVELLUS SYSTEMS, INC.
    Inventors: Richard Conti, Ronald Bourque, Nancy Klymko, Anita Madan, Michael Smits, Roy Tilghman, Kwong Wong, Daewon Yang
  • Publication number: 20070007548
    Abstract: A method is provided for making a FET device in which a nitride layer overlies the PFET gate structure, where the nitride layer has a compressive stress with a magnitude greater than about 2.8 GPa. This compressive stress permits improved device performance in the PFET. The nitride layer is deposited using a high-density plasma (HDP) process, wherein the substrate is disposed on an electrode to which a bias power in the range of about 50 W to about 500 W is supplied. The bias power is characterized as high-frequency power (supplied by an RF generator at 13.56 MHz). The FET device may also include NFET gate structures. A blocking layer is deposited over the NFET gate structures so that the nitride layer overlies the blocking layer; after the blocking layer is removed, the nitride layer is not in contact with the NFET gate structures. The nitride layer has a thickness in the range of about 300-2000 ?.
    Type: Application
    Filed: July 6, 2005
    Publication date: January 11, 2007
    Applicants: INTERNATIONAL BUSINESS MACHINES CORPORATION, NOVELLUS SYSTEMS INC.
    Inventors: Richard Conti, Ronald Bourque, Nancy Klymko, Anita Madan, Michael Smits, Roy Tilghman, Kwong Wong, Daewon Yang
  • Publication number: 20060273056
    Abstract: The display rack of the present invention includes a main frame, at least two shelf receiving portions, a plurality of shelves and at least one basket, peg hook basket or reel assembly. The main frame has a back portion and side portions. Each shelf receiving portion is attached to the main frame and has a plurality of generally vertically spaced apart shelf receiving apertures formed therein. Each shelf has spaced apart shelf fingers adapted to be received in the shelf receiving apertures. The plurality of shelves is chosen from the group consisting of shelf basket racks and shelf reel racks. In another aspect of the invention there is provided a web basket for use in association with hanging products. The web basket includes a hook portion, a basket portion and a means for attaching the basket to a shelf. The basket portion is spaced below the hook portion.
    Type: Application
    Filed: May 15, 2006
    Publication date: December 7, 2006
    Inventors: Michael Smits, Lance Perrin