Abstract: An apparatus for identifying defects within the volume of a transparent sheet, such as a glass sheet, is provided. The apparatus includes an illumination device that directs incident light onto at least a portion of a surface of the sheet so as to illuminate the sheet, and an image detector onto which the light backscattered from the sheet is directed to image the sheet. The apparatus generates at least two interference images under different capturing conditions in order to perform identification of defects by evaluating the at least two interference images.

Abstract: A method and an apparatus for detecting cracks in semiconductor substrates, such as silicon wafers and solar cells, are provided. The method and apparatus are based on the detection of light deflected at a crack.

Abstract: An apparatus for identifying defects within the volume of a transparent sheet, such as a glass sheet, is provided. The apparatus includes an illumination device that directs incident light onto at least a portion of a surface of the sheet so as to illuminate the sheet, and an image detector onto which the light backscattered from the sheet is directed to image the sheet. The apparatus generates at least two interference images under different capturing conditions in order to perform identification of defects by evaluating the at least two interference images.

Abstract: The invention relates to a method and an apparatus for detecting cracks in semiconductor substrates, such as silicon wafers and solar cells. The method and apparatus are based on the detection of light deflected at a crack.

Abstract: A method and device generate digital still pictures of wafer-shaped elements, such as wafers or solar cells, which are transported in series on a conveyor belt during a production process. The device has a camera taking pictures of the wafer-shaped elements in sections step-by-step, in particular continuously taking digital pictures line-by-line (linear scanning) transverse to the transport direction, and then sampling the recorded image data. The device also includes a hardware-based image data processing unit, e.g. FPGA, for detecting edges of the wafer-shaped elements that indicate a beginning or an end of each of the wafer-shaped elements. The edge detection is for controlling the generation of the digital still pictures for visual inspection to find defective areas of the elements.

Abstract: A method and device generate digital still pictures of wafer-shaped elements, such as wafers or solar cells, which are transported in series on a conveyor belt during a production process. The device has a camera taking pictures of the wafer-shaped elements in sections step-by-step, in particular continuously taking digital pictures line-by-line (linear scanning) transverse to the transport direction, and then sampling the recorded image data. The device also includes a hardware-based image data processing unit, e.g. FPGA, for detecting edges of the wafer-shaped elements that indicate a beginning or an end of each of the wafer-shaped elements. The edge detection is for controlling the generation of the digital still pictures for visual inspection to find defective areas of the elements.

Abstract: The invention discloses a standard for referencing luminescence signals, having an optically transparent base material comprising a lanthanum phosphate glass, a fluorophosphate glass, a fluor-crown glass, a lanthanum glass, a glass-ceramic formed therefrom or a lithium aluminosilicate glass-ceramic, the base material including a bulk doping with at least one constituent which is luminescent and comprises at least one rare earth and/or a nonferrous metal, in particular cobalt, chromium or manganese.

Abstract: In order to be able to measure topographies on wafers or devices in a fashion free from destruction, the invention provides a method for measuring three-dimensional topographic structures (22) on wafers (2) or devices in which with the aid of a confocal microscope (1) at least one fluorescing topographic structure (22) is scanned with excitation light, and the fluorescence light emitted from the focal point (17) in the focal plane (19) of the objective (15) and excited by the excitation light is detected, and measured data are obtained from the position of the focal point (17) and the detected fluorescence signal.

Abstract: The invention discloses a standard for referencing luminescence signals, having an optically transparent base material comprising a lanthanum phosphate glass, a fluorophosphate glass, a fluor-crown glass, a lanthanum glass, a glass-ceramic formed therefrom or a lithium aluminosilicate glass-ceramic, the base material including a bulk doping with at least one constituent which is luminescent and comprises at least one rare earth and/or a nonferrous metal, in particular cobalt, chromium or manganese.

Abstract: The invention discloses a standard for referencing luminescence signals, having an optically transparent base material comprising a lanthanum phosphate glass, a fluorophosphate glass, a fluor-crown glass, a lanthanum glass, a glass-ceramic formed therefrom or a lithium aluminosilicate glass-ceramic, the base material including a bulk doping with at least one constituent which is luminescent and comprises at least one rare earth and/or a nonferrous metal, in particular cobalt, chromium or manganese.