Patents by Inventor Michael Steven Billig

Michael Steven Billig has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method to selectively heat semiconductor wafers
    Patent number: 6245692
    Abstract: A method for manufacturing integrated circuits; particularly, a method to alter heat flow on a localized basis, when heating wafers to elevated temperatures, to achieve different processing temperatures by altering the material properties, such as emissivity, absorptivity and reflectivity, of a portion of a surface by the application of thin films of various materials.
    Type: Grant
    Filed: November 23, 1999
    Date of Patent: June 12, 2001
    Assignee: Agere Systems Guardian Corp.
    Inventors: Charles Walter Pearce, Michael Steven Billig