Patents by Inventor Michael Tanguay
Michael Tanguay has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9349570Abstract: An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput.Type: GrantFiled: March 31, 2015Date of Patent: May 24, 2016Assignee: FEI CompanyInventors: Enrique Agorio, James Edgar Hudson, Gerhard Daniel, Michael Tanguay, Jason Arjavac
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Publication number: 20150311034Abstract: An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput.Type: ApplicationFiled: March 31, 2015Publication date: October 29, 2015Inventors: Enrique Agorio, James Edgar Hudson, Gerhard Daniel, Michael Tanguay, Jason Arjavac
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Patent number: 8993962Abstract: An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput.Type: GrantFiled: January 21, 2013Date of Patent: March 31, 2015Assignee: FEI CompanyInventors: Enrique Agorio, James Edgar Hudson, Gerhard Daniel, Michael Tanguay, Jason Arjavac
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Patent number: 8399864Abstract: A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.Type: GrantFiled: August 31, 2011Date of Patent: March 19, 2013Assignee: FEI CompanyInventors: Raymond Hill, Lawrence Scipioni, Colin August Sanford, Mark DiManna, Michael Tanguay
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Patent number: 8357913Abstract: An improved method and apparatus for extracting and handling samples for STEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput.Type: GrantFiled: October 20, 2007Date of Patent: January 22, 2013Assignee: FEI CompanyInventors: Enrique Agorio, James Edgar Hudson, Michael Tanguay, Jason Arjavac, Gerhard Daniel
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Publication number: 20110309263Abstract: A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.Type: ApplicationFiled: August 31, 2011Publication date: December 22, 2011Applicant: FEI COMPANYInventors: Raymond Hill, Colin August Sanford, Lawrence Scipioni, Mark DiManna, Michael Tanguay
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Patent number: 8013311Abstract: A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.Type: GrantFiled: October 9, 2009Date of Patent: September 6, 2011Assignee: FEI CompanyInventors: Raymond Hill, Lawrence Scipioni, Colin August Sanford, Mark DiManna, Michael Tanguay
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Publication number: 20100305747Abstract: An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder.Type: ApplicationFiled: October 20, 2007Publication date: December 2, 2010Applicant: FEI COMPANYInventors: Enrique Agorio, James Edgar Hudson, Gerhard Daniel, Michael Tanguay, Jason Arjavac
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Publication number: 20100025578Abstract: A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.Type: ApplicationFiled: October 9, 2009Publication date: February 4, 2010Applicant: FEI COMPANYInventors: Raymond Hill, Colin August Sanford, Lawrence Scipioni, Mark DiManna, Michael Tanguay
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Patent number: 7601976Abstract: A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.Type: GrantFiled: December 18, 2006Date of Patent: October 13, 2009Assignee: FEI CompanyInventors: Raymond Hill, Colin August Sanford, Lawrence Scipioni, Mark DiManna, Michael Tanguay
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Patent number: 7511282Abstract: Methods of extracting a TEM sample from a substrate include milling a hole on the sample and inserting a probe into the hole. The sample adheres to the probe, and can be processed on transferred while on the probe. In another embodiment, the sample is freed from a substrate and adheres to a probe by electrostatic attraction. The sample is placed onto a TEM sample holder in a vacuum chamber.Type: GrantFiled: May 25, 2006Date of Patent: March 31, 2009Assignee: FEI CompanyInventors: Enrique Agorio, Michael Tanguay, Christophe Roudin, Liang Hong, Jay Jordan, Craig Henry, Mark Darus
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Publication number: 20080035860Abstract: A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.Type: ApplicationFiled: December 18, 2006Publication date: February 14, 2008Applicant: FEI CompanyInventors: Raymond Hill, Colin Sanford, Lawrence Scipioni, Mark DiManna, Michael Tanguay
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Publication number: 20070272854Abstract: Methods of extracting a TEM sample from a substrate include milling a hole on the sample and inserting a probe into the hole. The sample adheres to the probe, and can be processed on transferred while on the probe. In another embodiment, the sample is freed from a substrate and adheres to a probe by electrostatic attraction. The sample is placed onto a TEM sample holder in a vacuum chamber.Type: ApplicationFiled: May 25, 2006Publication date: November 29, 2007Inventors: Enrique Agorio, Michael Tanguay, Christophe Roudin, Liang Hong, Jay Jordan, Craig Henry, Mark Darus
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Patent number: 7161159Abstract: A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.Type: GrantFiled: July 13, 2004Date of Patent: January 9, 2007Assignee: FEI CompanyInventors: Raymond Hill, Colin August Sanford, Lawrence Scipioni, Mark DiManna, Michael Tanguay
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Publication number: 20050035291Abstract: A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.Type: ApplicationFiled: July 13, 2004Publication date: February 17, 2005Inventors: Raymond Hill, Colin Sanford, Lawrence Scipioni, Mark DiManna, Michael Tanguay
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Patent number: 6661009Abstract: The present invention provides a column tilt apparatus and method for providing an off-normal angle of incidence of a beam in a scanned beam system onto a substrate passing through the eucentric point that is electro-mechanically adjustable during operation while maintaining vacuum integrity of the column and work chamber, and without introducing significant vibrations.Type: GrantFiled: May 31, 2002Date of Patent: December 9, 2003Assignee: FEI CompanyInventors: Alexander Groholski, Riccardo Drainoni, Michael Tanguay
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Publication number: 20030222221Abstract: The present invention provides a column tilt apparatus and method for providing an off-normal angle of incidence of a beam in a scanned beam system onto a substrate passing through the eucentric point that is electro-mechanically adjustable during operation while maintaining vacuum integrity of the column and work chamber, and without introducing significant vibrations.Type: ApplicationFiled: May 31, 2002Publication date: December 4, 2003Inventors: Alexander Groholskiy, Riccardo Drainoni, Michael Tanguay