Patents by Inventor Michael Thomas Haag

Michael Thomas Haag has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process equipment architecture
    Patent number: 9508576
    Abstract: Embodiments of the present invention relate to improvements to single-substrate, multi-chamber processing platform architecture for minimizing fabrication facility floor space requirements. Prior art systems require significant floor space around all sides to allow for adequate installation and servicing. Embodiments of the present invention provide platforms that allow for servicing the chambers and supporting systems via a front and rear of the platform allowing multiple, side-by-side platform placement within a fabrication facility, while providing improved serviceability of the platform components.
    Type: Grant
    Filed: June 1, 2012
    Date of Patent: November 29, 2016
    Assignee: Applied Materials, Inc.
    Inventors: Jacob Newman, Dinesh Kanawade, Miriam Schwartz, Nir Merry, Michael Thomas Haag
  • PROCESS EQUIPMENT ARCHITECTURE
    Publication number: 20120235339
    Abstract: Embodiments of the present invention relate to improvements to single-substrate, multi-chamber processing platform architecture for minimizing fabrication facility floor space requirements. Prior art systems require significant floor space around all sides to allow for adequate installation and servicing. Embodiments of the present invention provide platforms that allow for servicing the chambers and supporting systems via a front and rear of the platform allowing multiple, side-by-side platform placement within a fabrication facility, while providing improved serviceability of the platform components.
    Type: Application
    Filed: June 1, 2012
    Publication date: September 20, 2012
    Applicant: Applied Materials, Inc.
    Inventors: Jacob Newman, Dinesh Kanawade, Miriam Schwartz, Nir Merry, Michael Thomas Haag
  • PROCESS EQUIPMENT ARCHITECTURE
    Publication number: 20100116205
    Abstract: Embodiments of the present invention relate to improvements to single-substrate, multi-chamber processing platform architecture for minimizing fabrication facility floor space requirements. Prior art systems require significant floor space around all sides to allow for adequate installation and servicing. Embodiments of the present invention provide platforms that allow for servicing the chambers and supporting systems via a front and rear of the platform allowing multiple, side-by-side platform placement within a fabrication facility, while providing improved serviceability of the platform components.
    Type: Application
    Filed: November 7, 2008
    Publication date: May 13, 2010
    Inventors: Jacob Newman, Dinesh Kanawade, Miriam Schwartz, Nir Merry, Michael Thomas Haag