Patents by Inventor Michael Torkler

Michael Torkler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process For Polishing A Silicon Surface By Means Of A Cerium Oxide-Containing Dispersion
    Publication number: 20110114872
    Abstract: Process for polishing silicon surfaces, in which a dispersion which comprises cerium oxide particles, at least one polymeric, anionic dispersing additive and at least one oxidizing agent and which has a pH of 7 to 10.5 is used, said cerium oxide particles having a positive charge and polymeric, anionic dispersing additive and oxidizing agent being soluble in the liquid phase of the dispersion.
    Type: Application
    Filed: December 12, 2008
    Publication date: May 19, 2011
    Applicant: EVONIK DEGUSSA GMBH
    Inventors: Michael Kroell, Michael Kraemer, Gerfried Zwicker, Michael Torkler