Patents by Inventor Michael Tristan Andreas

Michael Tristan Andreas has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Etching process in capacitor process of DRAM using a liquid etchant composition
    Patent number: 10593559
    Abstract: An etching process in a capacitor process for DRAM is described. A substrate is provided, which has thereon a silicon layer and metal electrodes in the silicon layer. The silicon layer is removed using a liquid etchant composition. The liquid etchant composition contains tetramethylammonium hydroxide (TMAH), an additive including hydroxylamine or a metal corrosion inhibitor, and water as a solvent.
    Type: Grant
    Filed: June 8, 2016
    Date of Patent: March 17, 2020
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Michael Tristan Andreas
  • ETCHING PROCESS IN CAPACITOR PROCESS OF DRAM USING A LIQUID ETCHANT COMPOSITION
    Publication number: 20160293448
    Abstract: An etching process in a capacitor process for DRAM is described. A substrate is provided, which has thereon a silicon layer and metal electrodes in the silicon layer. The silicon layer is removed using a liquid etchant composition. The liquid etchant composition contains tetramethylammonium hydroxide (TMAH), an additive including hydroxylamine or a metal corrosion inhibitor, and water as a solvent.
    Type: Application
    Filed: June 8, 2016
    Publication date: October 6, 2016
    Inventor: Michael Tristan Andreas
  • LIQUID ETCHANT COMPOSITION, AND ETCHING PROCESS IN CAPACITOR PROCESS OF DRAM USING THE SAME
    Publication number: 20150203753
    Abstract: An etching process in a capacitor process for DRAM is described. A substrate is provided, which has thereon a silicon layer and metal electrodes in the silicon layer. The silicon layer is removed using a liquid etchant composition. The liquid etchant composition contains tetramethylammonium hydroxide (TMAH), an additive including hydroxylamine or a metal corrosion inhibitor, and water as a solvent.
    Type: Application
    Filed: January 17, 2014
    Publication date: July 23, 2015
    Applicant: NANYA TECHNOLOGY CORPORATION
    Inventor: Michael Tristan Andreas